Piezoelectric inkjet printhead having temperature sensor and method of making the same
First Claim
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1. A piezoelectric inkjet printhead, comprising:
- a channel forming plate including an ink channel having a pressure chamber coupled to a nozzle;
a piezoelectric actuator including a lower electrode on the channel forming plate, a piezoelectric element on the lower electrode, and an upper electrode on the piezoelectric element, the piezoelectric actuator corresponding to the pressure chamber;
an insulation element on the lower electrode and spaced apart from the piezoelectric element;
a first electrode on the insulation element; and
a temperature sensor on the first electrode.
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Abstract
A piezoelectric inkjet printhead having a channel forming plate including an ink channel having a pressure chamber coupled to a nozzle, a piezoelectric actuator including a lower electrode on the channel forming plate, a piezoelectric element on the lower electrode, and an upper electrode on the piezoelectric element, the piezoelectric actuator corresponding to the pressure chamber, an insulation element on the lower electrode and spaced apart from the piezoelectric element, a first electrode on the insulation element, and a temperature sensor on the first electrode, and a method of making the same.
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Citations
23 Claims
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1. A piezoelectric inkjet printhead, comprising:
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a channel forming plate including an ink channel having a pressure chamber coupled to a nozzle;
a piezoelectric actuator including a lower electrode on the channel forming plate, a piezoelectric element on the lower electrode, and an upper electrode on the piezoelectric element, the piezoelectric actuator corresponding to the pressure chamber;
an insulation element on the lower electrode and spaced apart from the piezoelectric element;
a first electrode on the insulation element; and
a temperature sensor on the first electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of forming an inkjet printhead having a piezoelectric actuator and a temperature sensor, comprising:
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forming a lower electrode of the piezoelectric actuator on a channel forming plate;
forming an insulation element on a portion of the lower electrode;
forming a first electrode on the insulation element; and
attaching a temperature sensor on the first electrode. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23)
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Specification