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Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method

  • US 20060170901A1
  • Filed: 02/06/2006
  • Published: 08/03/2006
  • Est. Priority Date: 02/06/2004
  • Status: Abandoned Application
First Claim
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1. An illumination optical apparatus for illuminating a surface to be illuminated, based on illumination radiation supplied from a radiation source, comprising:

  • a polarization modulating element, which is arranged in an optical path of the illumination radiation, which is made of an optical material with optical activity, and which has a circumferentially varying thickness; and

    a movable optical element arranged in an optical path between the polarization modulating element and the surface to be illuminated.

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