Sensing a dimensional change in a surface

• US 20060170934A1
• Filed: 01/28/2005
• Published: 08/03/2006
• Est. Priority Date: 01/28/2005
• Status: Active Grant

• Current Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Original Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Inventors: Gao, Jun, Picciotto, Carl E., Tong, William M.
• Granted Patent: US 7,796,800 B2
• Time in Patent Office: Days
• US Class Current: 356/625
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G01B 11/002 for measuring two or more coordinates
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: G03F 9/7003 Alignment type or strategy, e.g. leveling, global alignment
• CPC Class Codes: G03F 9/7088 Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
• CPC Class Codes: G03F 9/7092 Signal processing

Abstract

Determining a dimensional change in a surface of an object is described. At a first time, a first image of the surface is acquired at a first spatial window thereon having a first known position relative to a frame of reference. At a second time, a second image of the surface is acquired at a second spatial window thereon having a second known position relative to the frame of reference. The first image and the second image are processed according to an image displacement sensing algorithm to determine a relative translation of a first point on the surface between the first and second times. The relative translation of the first point, the first known position, and the second known position are used to determine the dimensional change in the surface between the first and second times.

Claims

1. A method for determining a dimensional change in a surface of an object, comprising:

at a first time, acquiring a first image of said surface at a first spatial window thereon having a first known position relative to a frame of reference;

at a second time, acquiring a second image of said surface at a second spatial window thereon having a second known position relative to said frame of reference;

processing said first image and said second image according to an image displacement sensing algorithm to determine a relative translation of a first point on said surface between said first and second times; and

using said relative translation of said first point, said first known position, and said second known position to determine the dimensional change in said surface between said first and second times.

2. The method of claim 1, wherein said first and second spatial windows are relatively small compared to an overall dimension of said surface.

3. The method of claim 2, said first image being acquired by a first optical camera, said second image also being acquired by said first optical camera.

4. The method of claim 3, wherein said first and second spatial windows are at a common location.

5. The method of claim 2, wherein the dimensional change of said surface comprises an isotropic expansion, and wherein said surface includes a reference point having a known location relative to said frame of reference at each of said first and second times.

6. The method of claim 2, the dimensional change of said surface comprising an affine distortion, the method further comprising:

near said first time, acquiring a third image of said surface at a third spatial window thereon having a third known position relative to said frame of reference;

near said second time, acquiring a fourth image of said surface at a fourth spatial window thereon having a fourth known position relative to said frame of reference;

processing said third image and said fourth image to determine a relative translation of a second point on said surface between said first and second times; and

using said relative translation of said second point, said third known position, and said fourth known position in conjunction with said relative translation of said first point, said first known position, and said second known position to determine the dimensional change in said surface between said first and second times.

7. The method of claim 6, said first and second images being acquired by a first optical camera such that said first and second spatial windows are at a first common location fixed relative to the frame of reference, said third and fourth images being acquired by a second optical camera such that said third and fourth spatial windows are at a second common location fixed relative to the frame of reference, said surface including a central point of interest, the method further comprising:

prior to said first time, causing said central point of interest to be centered between said first and second common locations; and

providing said determined relative translations of said first and second points to a feedback control system mechanically coupled to said object and configured to maintain said relative translations of said first and second points at equal and opposite values, thereby causing said central point of interest to remain centered between said first and second common locations.

8. The method of claim 6, further comprising:

near said first time, acquiring a fifth image of said surface at a fifth spatial window thereon having a fifth known position relative to said frame of reference;

near said second time, acquiring a sixth image of said surface at a sixth spatial window thereon having a sixth known position relative to said frame of reference;

processing said fifth image and said sixth image to determine a relative translation of a third point on said surface between said first and second times; and

using said relative translations of said first, second, and third points in conjunction with said first, second, third, fourth, fifth, and sixth positions to determine the dimensional change in said surface between said first and second times.

9. The method of claim 1, wherein said processing said first image and said second image according to an image displacement sensing algorithm comprises:

cross-correlating said first image and said second image to produce a cross-correlation function; and

locating a global extremum of said cross-correlation function.

10. The method of claim 9, said first image and said second image comprising pixels, wherein said cross-correlating comprises estimating a continuous correlation surface at sub-pixel locations, said estimating comprising:

computing a comparison function comprising, for each of a predetermined number of relative offset locations between the first image and the second image, a comparison metric therebetween; and

minimizing a cost function between the comparison function and an estimated continuous correlation surface, wherein the estimated continuous correlation surface comprises a finite-element fitting function.

11. The method of claim 10, wherein said comparison metric comprises a pixelwise sum of squared differences between said first image and said second image at each offset, and wherein said predetermined number of relative offsets is a relatively small percentage of a total number of elements in said first image.

12. The method of claim 1, wherein said processing said first image and said second image according to an image displacement sensing algorithm comprises determining a phase difference between frequency domain representations of said first and second images.

13. The method of claim 1, wherein said object comprises a nanoimprint lithography substrate, and wherein said frame of reference is fixably associated with an imprint lithography apparatus supporting said nanoimprint lithography substrate.

14. An apparatus for determining a dimensional change in a surface of an object between a first time and a second time, comprising:

a first imaging device acquiring a first image of the surface at the first time in a first spatial window thereon having a first known position relative to a frame of reference and acquiring a second image of the surface at the second time in a second spatial window thereon having a second known position relative to the frame of reference; and

a processor processing said first image and said second image to determine a relative shift of a first point on said surface between said first and second times, said determined relative shift being used in conjunction with said first known position, said second known position, and known positions of a second point on said surface at said first and second times for computing the dimensional change;

wherein each of said first and second windows is relatively small compared to at least one dimension of the surface;

and wherein said processing said first image and said second image to determine said relative shift comprises an image displacement sensing algorithm.

15. The apparatus of claim 14, wherein said image displacement sensing algorithm comprises at least one of a differential image flow algorithm, a tensor-based image flow algorithm, a correlation-based image flow algorithm, a phase-shift-based image flow algorithm, and an error analysis-based algorithm, each adapted for rigid-body flow.

16. The apparatus of claim 15, wherein said object comprises a nanoimprint lithography substrate, wherein said first imaging device comprises an optical camera, and wherein said frame of reference is fixably associated with an imprint lithography apparatus supporting said nanoimprint lithography substrate.

17. The apparatus of claim 16, wherein said second point is fixably positioned relative to said imprint lithography apparatus at said first and second times.

18. The apparatus of claim 14, the dimensional change of said surface comprising an affine distortion, the apparatus further comprising a second imaging device acquiring a third image of the surface near the first time in a third spatial window thereon having a third known position relative to the frame of reference, said third image including said second point, said second imaging device acquiring a fourth image of the surface near the second time in a fourth spatial window thereon having a fourth known position relative to the frame of reference, said processor computing said known positions of said second point using said third image, said fourth image, and said third and fourth known locations.

19. The apparatus of claim 18, said first and second spatial windows being at a first common location fixed relative to the frame of reference, said third and fourth spatial windows being at a second common location fixed relative to the frame of reference, said surface including a central point of interest positioned halfway between said first and second common locations, the apparatus further comprising a feedback control system mechanically coupled to said object and configured to use said computed dimensional change to maintain said central point of interest halfway between said first and second common locations.

20. The apparatus of claim 18, further comprising a third imaging device acquiring a fifth image of the surface near the first time in a fifth spatial window thereon having a fifth known position relative to the frame of reference, said third imaging device acquiring a sixth image of the surface near the second time in a sixth spatial window thereon having a sixth known position relative to the frame of reference, said processor processing said fifth image and said sixth image to determine a relative shift of a third point on said surface between said first and second times, said processor computing the dimensional change based on the relative shift of the first point, the relative shift of the third point, the known positions of said second point at said first and second times, and said first, second, fifth, and sixth known positions.

21. An apparatus for determining a dimensional change in a substrate, comprising:

means for acquiring a first image of the substrate at a first time in a first spatial window thereover having a first known position relative to a frame of reference;

means for acquiring a second image of the substrate at a second time in a second spatial window thereover having a second known position relative to the frame of reference; and

means for processing said first image and said second image to determine a relative shift of a first point on said substrate between said first and second times, said determined relative shift being used in conjunction with said first known position, said second known position, and known positions of a second point on said substrate at said first and second times for computing the dimensional change;

wherein each of said first and second windows is relatively small compared to at least one dimension of the surface;

and wherein said means for processing said first image and said second image to determine said relative shift uses an image displacement sensing algorithm.

22. The apparatus of claim 21, wherein said image displacement sensing algorithm comprises at least one of a differential image flow algorithm, a tensor-based image flow algorithm, a correlation-based image flow algorithm, a phase-shift-based image flow algorithm, and an error analysis-based algorithm, each adapted for rigid-body flow.

23. The apparatus of claim 22, said means for imaging comprises an optical camera, and wherein said frame of reference is fixably associated with an imprint lithography apparatus supporting said substrate.

24. A computer readable medium storing computer code for determining a dimensional change in a surface of an object, comprising:

computer code for receiving a first image of the surface in a first spatial window thereon having a first known position relative to a frame of reference, the first image being acquired at a first time;

computer code for receiving a second image of the surface in a second spatial window thereon having a second known position relative to said frame of reference, the second image being acquired at a second time;

computer code for processing said first image and said second image according to an image displacement sensing algorithm to determine a relative translation of a first point on said surface between said first and second times; and

computer code for determining the dimensional change in said surface between said first and second times based on said relative translation of said first point, said first known position, and said second known position.

25. The computer readable medium of claim 24, wherein said first and second spatial windows are relatively small compared to an overall dimension of said surface.

26. The computer readable medium of claim 25, said first image and said second image having been acquired by the same camera.

27. The computer readable medium of claim 25, wherein the dimensional change of said surface comprises an isotropic expansion, and wherein said surface includes a reference point having a known location relative to said frame of reference at each of said first and second times.

28. The computer readable medium of claim 25, the dimensional change of said surface comprising an affine distortion, further comprising:

computer code for receiving a third image of said surface at a third spatial window thereon having a third known position relative to said frame of reference, the third image being acquired near said first time;

computer code for receiving a fourth image of said surface at a fourth spatial window thereon having a fourth known position relative to said frame of reference, the fourth image being acquired near said second time;

computer code for processing said third image and said fourth image to determine a relative translation of a second point on said surface between said first and second times; and

computer code for determining the dimensional change in said surface between said first and second times using said relative translation of said second point, said third known position, and said fourth known position in conjunction with said relative translation of said first point, said first known position, and said second known position.

29. An apparatus for imprint lithography, comprising:

a platen for supporting a substrate, said substrate undergoing a lateral affine distortion between a first and second time while supported by said platen;

a molding block for embossing said substrate by guiding an imprint lithography mold in a vertical direction relative to said substrate;

an imaging device configured to image said substrate at a plurality of relatively small windows thereon, each window being laterally fixed relative to at least one of said molding block and said platen; and

a processor comparing, for each of said windows, a first image acquired by said imaging device at a first time to a second image acquired by said imaging device at a second time according to an image displacement sensing algorithm to compute a local shift of said substrate relative to said window, said processor subsequently determining at least one parameter associated with said affine distortion based on said computed local shifts.

30. The apparatus of claim 29, wherein said comparing said first image to said second image according to an image displacement sensing algorithm comprises:

cross-correlating said first image and said second image to produce a cross-correlation function; and

locating a global extremum of said cross-correlation function.

31. The apparatus of claim 30, said first image and said second image comprising pixels, wherein said cross-correlating comprises estimating a continuous correlation surface at sub-pixel locations, said estimating comprising:

computing a comparison function comprising, for each of a predetermined number of relative offset locations between the first image and the second image, a comparison metric therebetween; and

minimizing a cost function between the comparison function and an estimated continuous correlation surface, wherein the estimated continuous correlation surface comprises a finite-element fitting function.

32. The apparatus of claim 31, wherein said comparison metric comprises a pixelwise sum of squared differences between said first image and said second image at each offset, and wherein said predetermined number of relative offsets is a relatively small percentage of a total number of elements in said first image.

33. The apparatus of claim 29, wherein said comparing said first image to said second image according to an image displacement sensing algorithm comprises determining a phase difference between frequency domain representations of said first and second images.

34. The apparatus of claim 29, wherein said affine distortion is associated with an isotropic lateral expansion parameter, a first translation parameter for a first lateral direction, and a second translation parameter for a second lateral direction, and wherein said imaging device comprises two optical cameras imaging said substrate at two windows laterally fixed relative to said molding block.

35. The apparatus of claim 29, further comprising a feedback control system coupled to said processor and mechanically coupled to one of said platen and said molding block, said feedback control system maintaining a predetermined local area on said substrate in a fixed position relative to said molding block based upon said at least one determined affine distortion parameter.