Wireless substrate-like sensor
First Claim
1. A method for determining position and orientation of a flat target in three dimensions, the method comprising:
- providing at least four reference indicia on the target;
digitizing an image of the target;
identifying the at least four reference indicia in the image of the target; and
solving a system of equations representing the indicia for a system of unknowns representative of the position and orientation based upon identification of the at least four reference indicia.
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Abstract
A wireless substrate-like sensor is provided to facilitate alignment and calibration of semiconductor processing systems. The wireless substrate-like sensor includes an optical image acquisition system that acquires one or more images of targets placed within the semiconductor processing system. Analysis of images of the targets obtained by the wireless substrate-like sensor provides position and/or orientation information in at least three degrees of freedom. An additional target is affixed to a known location within the semiconductor processing system such that imaging the reference position with the wireless substrate-like sensor allows the measurement and compensation for pick-up errors.
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Citations
13 Claims
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1. A method for determining position and orientation of a flat target in three dimensions, the method comprising:
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providing at least four reference indicia on the target;
digitizing an image of the target;
identifying the at least four reference indicia in the image of the target; and
solving a system of equations representing the indicia for a system of unknowns representative of the position and orientation based upon identification of the at least four reference indicia. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification