MEMS flow module with pivoting-type baffle
First Claim
1. A MEMS flow module, comprising:
- a first plate comprising a first flow port;
a structure comprising a first portion disposed in a fixed positional relationship relative to said first plate and a second portion that at least partially extends over said first flow port, wherein said second portion flexes relative to said first portion in response to the development of at least a certain differential pressure.
2 Assignments
0 Petitions
Accused Products
Abstract
Various embodiments of MEMS flow modules that regulate flow or pressure by the pivoting or pivoting-like movement of a flow regulating or controlling structure are disclosed. One such MEMS flow module (40) has a flow regulating structure (62) including a plurality of baffles (66) and a flow plate (50) including a plurality of flow ports (52). The flow regulating structure (62) also has a support (64) that is spaced from and anchored to the flow plate (50). Each baffle (66) is aligned with at least one flow port (52) and is interconnected to the support (64) of the flow regulating structure (62) in a manner that allows the baffles (66) to flex away from the flow plate (50) based upon the development of at least a certain differential pressure across the MEMS flow module (40).
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Citations
56 Claims
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1. A MEMS flow module, comprising:
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a first plate comprising a first flow port;
a structure comprising a first portion disposed in a fixed positional relationship relative to said first plate and a second portion that at least partially extends over said first flow port, wherein said second portion flexes relative to said first portion in response to the development of at least a certain differential pressure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A MEMS flow module, comprising:
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a first plate comprising a first flow port;
a cantilever structure comprising a first portion that is disposed in a fixed positional relationship relative to said first plate, as well as a free end that is operative to move along an at least generally arcuate path in response to the development of at least a certain differential pressure across said cantilever structure. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
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36. A MEMS flow module, comprising:
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a flow regulator that comprises a plurality of independently movable baffles; and
a first plate that comprises a plurality of first flow ports, wherein each said baffle is aligned with at least one said first flow port, wherein each said baffle is at least generally pivotable to change a magnitude of a spacing of said baffle from said first plate in response to a change in differential pressure across said MEMS flow module. - View Dependent Claims (37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56)
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Specification