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Scan data collection for better overall data accurancy

  • US 20060174384A1
  • Filed: 03/17/2006
  • Published: 08/03/2006
  • Est. Priority Date: 10/19/2001
  • Status: Active Grant
First Claim
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1. In an AFM (atomic force microscopy) system, a method for collecting scan data comprising:

  • positioning the probe to a first location on a surface to be scanned;

    collecting scan data along a first scan path comprising;

    obtaining information about the surface using a tip portion of the probe at a current location on the surface;

    translating the probe to a next location on the surface, including translating the probe in a first direction and in a second direction; and

    repeating the steps of obtaining and translating to collect the scan data, wherein each scan datum has corresponding information about the surface and a corresponding first coordinate indicative of a location on the surface;

    repeating the step of collecting for subsequent scan paths; and

    associating some of the scan data with second coordinates, so that some of the data appears to have been collected at the second coordinates, wherein subsequent processing of the scan data is performed based on the second coordinates for those scan data that have a corresponding second coordinate and based on the first coordinates for those scan data that do not have a corresponding second coordinate.

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