Hermetic chamber with electrical feedthroughs
First Claim
1. A device comprising:
- a housing having walls defining a chamber, a first one of said walls defining said chamber comprising an exterior wall of said housing;
a passage through said first one of said walls placing the chamber of said housing in communication with the ambient; and
an electrode hermetically imposed over said passage within said chamber of said housing, whereby said passage is hermetically sealed;
whereby said chamber is hermetically sealed; and
whereby an external electrical device can be placed in electrical communication with said electrode through said passage.
1 Assignment
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Accused Products
Abstract
A pressure cavity is durable, stable, and biocompatible and configured in such a way that it constitutes pico to nanoliter-scale volume. The pressure cavity is hermetically sealed from the exterior environment while maintaining the ability to communicate with other devices. Micromachined, hermetically-sealed sensors are configured to receive power and return information through direct electrical contact with external electronics. The pressure cavity and sensor components disposed therein are hermetically sealed from the ambient in order to reduce drift and instability within the sensor. The sensor is designed for harsh and biological environments, e.g. intracorporeal implantation and in vivo use. Additionally, novel manufacturing methods are employed to construct the sensors.
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Citations
40 Claims
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1. A device comprising:
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a housing having walls defining a chamber, a first one of said walls defining said chamber comprising an exterior wall of said housing;
a passage through said first one of said walls placing the chamber of said housing in communication with the ambient; and
an electrode hermetically imposed over said passage within said chamber of said housing, whereby said passage is hermetically sealed;
whereby said chamber is hermetically sealed; and
whereby an external electrical device can be placed in electrical communication with said electrode through said passage. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A device comprising:
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a unitary housing having walls defining first and second internal chambers, said first and second chambers having a common wall;
a passage through said common wall; and
an electrode within said first chamber hermetically imposed over said passage, whereby said passage is hermetically sealed;
whereby said first chamber is hermetically sealed from said second chamber; and
whereby said second chamber can be placed in electrical communication with said electrode through said passage. - View Dependent Claims (30, 31, 32, 33, 34, 35, 36, 37)
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38. A device comprising:
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a substrate having first and second sides;
a passage through said substrate from said first side to said second side; and
an electrode imposed against said first side of said substrate over said passage;
whereby an electrical device on the second side of said substrate can be placed in electrical communication with said electrode on said first side of said substrate through said passage. - View Dependent Claims (39, 40)
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Specification