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MEMS based RF components and a method of construction thereof

  • US 20060176124A1
  • Filed: 02/10/2005
  • Published: 08/10/2006
  • Est. Priority Date: 02/10/2005
  • Status: Abandoned Application
First Claim
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1. A MEMS-based RF component comprising a form, said form being a three dimensional waveguide, said form being capable of supporting a signal and having at least one of an input and output, said form having a MEMS structure at least partially therein, said MEMS structure being constructed to control an RF signal within said form.

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