MEMS based RF components and a method of construction thereof
First Claim
1. A MEMS-based RF component comprising a form, said form being a three dimensional waveguide, said form being capable of supporting a signal and having at least one of an input and output, said form having a MEMS structure at least partially therein, said MEMS structure being constructed to control an RF signal within said form.
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Abstract
A three dimensional waveguide is integrated with a MEMS structure to control a signal in various RF components. The components include switches, variable capacitors, filters and phase shifters. A controller controls movement of the MEMS structure to control a signal within the component. A method of construction and a method of operation of the component are described. The switches have high power handling capability and can be operated at high frequencies. By integrating a three dimensional waveguide with a MEMS structure, the components can be small in size with good operating characteristics.
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Citations
41 Claims
- 1. A MEMS-based RF component comprising a form, said form being a three dimensional waveguide, said form being capable of supporting a signal and having at least one of an input and output, said form having a MEMS structure at least partially therein, said MEMS structure being constructed to control an RF signal within said form.
- 36. A method of constructing a MEMS-based RF component having a three dimensional waveguide with a MEMS structure at least partially therein, said method comprising constructing a base plate and a top cover that is sized and shaped to fit on said base plate, one of said base plate and said top cover having a MEMS structure incorporated therein, and affixing said cover to said plate to form said component.
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41. A method of operating an RF component having a form that is a three dimensional waveguide, said form having a MEMS structure at least partially therein with a controller for said MEMS structure, said method comprising operating said controller to move said MEMS structure to control an RF signal within said form.
Specification