Optical scanner package and method of manufacturing the same
First Claim
1. An optical scanner package comprising:
- an optical scanner device scanning an incident beam, the optical scanner device including a mirror portion, comb-electrode structures rotating the mirror portion, and a base substrate; and
a cover glass protecting the mirror portion, the cover glass including support portions sealingly adhered to a top surface of the base substrate around the mirror portion and a transmission portion with first and second transmission surfaces formed on the support portions and sloped with respect to a top surface of the base substrate.
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Accused Products
Abstract
Provided are a chip-scale optical scanner package with reduced noise, and a method of manufacturing the optical scanner package. The optical scanner package includes: an optical scanner device scanning an incident beam, the optical scanner device including a mirror portion, comb-electrode structures rotating the mirror portion, and a base substrate; and a cover glass protecting the mirror portion, the cover glass including support portions sealingly adhered to a top surface of the base substrate around the mirror portion and a transmission portion with first and second transmission surfaces formed on the support portions and sloped with respect to a top surface of the base substrate. Accordingly, the optical scanner package can be miniaturized, can be simply processed, and reduce packaging costs. Further, the brightness and contrast of an image can be enhanced, and background noise can be reduced by reducing a sub reflected beam that causes noise.
22 Citations
11 Claims
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1. An optical scanner package comprising:
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an optical scanner device scanning an incident beam, the optical scanner device including a mirror portion, comb-electrode structures rotating the mirror portion, and a base substrate; and
a cover glass protecting the mirror portion, the cover glass including support portions sealingly adhered to a top surface of the base substrate around the mirror portion and a transmission portion with first and second transmission surfaces formed on the support portions and sloped with respect to a top surface of the base substrate. - View Dependent Claims (2, 3, 4, 5)
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6. A method of manufacturing an optical scanner package, comprising:
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forming an optical scanner device by stacking a mirror portion and comb-electrode structures for rotating the mirror portion on a wafer that forms a base substrate;
forming a cavity so that the optical scanner device can include support portions installed on a top surface of the base substrate around the mirror portion and a transmission portion with first and second transmission surfaces formed on the support portions, and processing a cover glass by making the thickness at one side of the support portions less than the thickness at the other side of the support portions so that the first and second transmission surfaces can be sloped with respect to the top surface of the base substrate; and
hermetically sealing the mirror portion in a chip scale by adhering the top surface of the base substrate to bottom surfaces of the support portions. - View Dependent Claims (7, 8, 9, 10, 11)
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Specification