Wafer movement control macros
First Claim
1. A computer-implemented method for creating a set of wafer transfer instructions configured to transfer a wafer between an origination wafer-holding location and a destination wafer-holding location in a plasma cluster tool, said plasma cluster tool having a plurality of wafer-holding locations, comprising:
- receiving a first user-provided location indicator, said first user-provided location indicator graphically identifying said origination wafer-holding location on an on-screen graphical representation of said plasma cluster tool;
receiving a second user-provided location indicator, said second user-provided location indicator graphically identifying said destination wafer-holding location on said on-screen graphical representation of said plasma cluster tool;
ascertaining data pertaining to a path between said first user-provided location indicator and said second user-provided location indicator; and
forming said set of wafer transfer instructions responsive to said data pertaining to said path, said set of wafer transfer instructions being configured to transfer said wafer along a set of wafer-holding locations associated with said path.
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Accused Products
Abstract
A computer-implemented method for creating a set of wafer transfer instructions configured to transfer a wafer between an origination wafer-holding location and a destination wafer-holding location in a plasma cluster tool, which has a plurality of wafer-holding locations. The method includes receiving a first user-provided location indicator and a second user-provided location indicator, which graphically identify the origination wafer-holding location and the destination wafer-holding location respectively on the on-screen graphical representation of the plasma cluster tool. The method further includes ascertaining data pertaining to a path between the first user-provided location indicator and the second user-provided location indicator. The method further includes forming the set of wafer transfer instructions responsive to the data pertaining to the path. The set of wafer transfer instructions is configured to transfer the wafer along a set of wafer-holding locations associated with the path.
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Citations
23 Claims
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1. A computer-implemented method for creating a set of wafer transfer instructions configured to transfer a wafer between an origination wafer-holding location and a destination wafer-holding location in a plasma cluster tool, said plasma cluster tool having a plurality of wafer-holding locations, comprising:
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receiving a first user-provided location indicator, said first user-provided location indicator graphically identifying said origination wafer-holding location on an on-screen graphical representation of said plasma cluster tool;
receiving a second user-provided location indicator, said second user-provided location indicator graphically identifying said destination wafer-holding location on said on-screen graphical representation of said plasma cluster tool;
ascertaining data pertaining to a path between said first user-provided location indicator and said second user-provided location indicator; and
forming said set of wafer transfer instructions responsive to said data pertaining to said path, said set of wafer transfer instructions being configured to transfer said wafer along a set of wafer-holding locations associated with said path. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A computer-implemented method for creating a set of wafer transfer instructions configured to transfer a wafer between an origination wafer-holding location and a destination wafer-holding location in a plasma cluster tool, said plasma cluster tool having a plurality of wafer-holding locations, comprising:
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receiving a first user-provided location indicator, said first user-provided location indicator graphically identifying said origination wafer-holding location on an on-screen graphical representation of said plasma cluster tool;
receiving a second user-provided location indicator, said second user-provided location indicator graphically identifying said destination wafer-holding location on said on-screen graphical representation of said plasma cluster tool;
ascertaining data pertaining to a path between said first user-provided location indicator and said second user-provided location indicator, said path traversing at least one other wafer-holding location other than said origination wafer-holding location and said destination wafer-holding location, said path including identities of wafer-holding locations between said origination wafer-holding location and said destination wafer-holding locations; and
forming said set of wafer transfer instructions responsive to said data pertaining to said path, said set of wafer transfer instructions being configured to transfer said wafer along said wafer-holding locations associated with said path. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A computer-implemented method for creating a set of wafer transfer instructions configured to transfer a wafer between an origination wafer-holding location and a destination wafer-holding location in a plasma cluster tool, said plasma cluster tool having a plurality of wafer-holding locations, comprising:
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ascertaining said origination wafer-holding location;
ascertaining said destination wafer-holding location;
automatically ascertaining data pertaining to a path between said origination wafer-holding location and said destination wafer-holding location, said path traversing at least one other wafer-holding location other than said origination wafer-holding location and said destination wafer-holding location, said path including identities of wafer-holding locations between said origination wafer-holding location and said destination wafer-holding locations; and
automatically forming said set of wafer transfer instructions responsive to said data pertaining to said path, said set of wafer transfer instructions being configured to transfer said wafer along said wafer-holding locations associated with said path. - View Dependent Claims (16, 17, 18, 19, 20)
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21. An arrangement for creating a set of wafer transfer instructions configured to transfer a wafer between an origination wafer-holding location and a destination wafer-holding location in a plasma cluster tool, said plasma cluster tool having a plurality of wafer-holding locations, comprising:
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means for receiving a first user-provided location indicator and a second user-provided location indicator, said first user-provided location indicator graphically identifying said origination wafer-holding location on an on-screen graphical representation of said plasma cluster tool, said second user-provided location indicator graphically identifying said destination wafer-holding location on said on-screen graphical representation of said plasma cluster tool;
means for ascertaining data pertaining to a path between said first user-provided location indicator and said second user-provided location indicator; and
means for forming said set of wafer transfer instructions responsive to said data pertaining to said path, said set of wafer transfer instructions being configured to transfer said wafer along a set of wafer-holding locations associated with said path. - View Dependent Claims (22, 23)
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Specification