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Micromachined apparatus with co-linear drive arrays

  • US 20060179945A1
  • Filed: 02/23/2006
  • Published: 08/17/2006
  • Est. Priority Date: 02/06/2002
  • Status: Active Grant
First Claim
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1. Apparatus comprising:

  • a substrate; and

    a plurality of resonator structures, the resonator structures including at least one mass movable relative to the substrate, the resonator structures further including a drive arrangement for each mass, the drive arrangement including a first electrode oriented in a first direction and a second electrode oriented in a second direction opposite the first direction, wherein each of the first and second electrodes is affixed to the substrate using a plurality of anchors, and wherein the anchors for the first and second electrodes are arranged to be co-linear in a lateral direction relative to the motion of the mass.

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