Micromachined apparatus with co-linear drive arrays
First Claim
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1. Apparatus comprising:
- a substrate; and
a plurality of resonator structures, the resonator structures including at least one mass movable relative to the substrate, the resonator structures further including a drive arrangement for each mass, the drive arrangement including a first electrode oriented in a first direction and a second electrode oriented in a second direction opposite the first direction, wherein each of the first and second electrodes is affixed to the substrate using a plurality of anchors, and wherein the anchors for the first and second electrodes are arranged to be co-linear in a lateral direction relative to the motion of the mass.
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Abstract
A mass includes a first set of drive fingers interdigitated with a first array of fixed drive fingers and a second set of drive fingers interdigitated with a second array of fixed drive fingers. Each array of fixed drive fingers is affixed to a substrate using a plurality of anchors. The anchors for the first and second arrays of fixed drive fingers are arranged to be co-linear in a lateral direction relative to the motion of the mass.
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Citations
21 Claims
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1. Apparatus comprising:
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a substrate; and
a plurality of resonator structures, the resonator structures including at least one mass movable relative to the substrate, the resonator structures further including a drive arrangement for each mass, the drive arrangement including a first electrode oriented in a first direction and a second electrode oriented in a second direction opposite the first direction, wherein each of the first and second electrodes is affixed to the substrate using a plurality of anchors, and wherein the anchors for the first and second electrodes are arranged to be co-linear in a lateral direction relative to the motion of the mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification