Spring structure and micro-structure employing the same
First Claim
1. A spring structure comprising:
- at least one support post unit fixed to a substrate; and
at least one spring unit comprising a first spring member connected to the support post unit and extending in a predetermined direction from the support post unit, a second spring member connected to a floating member and extending in the same direction as the first spring member from the floating member, and a connection member interconnecting tip ends of the first and second spring members.
1 Assignment
0 Petitions
Accused Products
Abstract
A spring structure for supporting a floating member and a micro-structure having the same. The spring structure includes: at least one support post unit fixed to a substrate; and at least one spring unit having a first spring connected to the support post unit and extending in a predetermined direction from the support post unit, a second spring member connected to a floating member and extending in the same direction as the first spring unit from the floating member, and a connection member arranged normal to the first and second spring members and interconnecting the tip ends of the first and second spring members. Because the first spring member and the second spring member are arranged to be expanded or contracted along with the floating member when the temperature changes, the first and second spring members are not subject to stress caused due to the difference in thermal expansion coefficient.
6 Citations
21 Claims
-
1. A spring structure comprising:
-
at least one support post unit fixed to a substrate; and
at least one spring unit comprising a first spring member connected to the support post unit and extending in a predetermined direction from the support post unit, a second spring member connected to a floating member and extending in the same direction as the first spring member from the floating member, and a connection member interconnecting tip ends of the first and second spring members. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
-
11. A micro-structure comprising:
-
a substrate;
a floating member; and
a spring structure for supporting the floating member in such a manner that the floating member is retained in floating state above the substrate with a gap being formed between the substrate and the floating member, wherein the spring structure comprises;
at least one support post unit fixed to a substrate; and
at least one spring unit comprising a first spring member connected to the support post unit and extending in a predetermined direction from the support post unit, a second spring member connected to a floating member and extending in the same direction as the first spring member from the floating member, and a connection member interconnecting tip ends of the first and second spring members. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
-
Specification