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Film acoustically-coupled transformers with two reverse c-axis piezoelectric elements

  • US 20060185139A1
  • Filed: 04/14/2006
  • Published: 08/24/2006
  • Est. Priority Date: 10/30/2003
  • Status: Active Grant
First Claim
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1. A method of making an acoustically-coupled transformer, the method comprising:

  • fabricating a first stacked bulk acoustic resonator (SBAR) and a second SBAR, the fabricating comprising;

    forming lower film bulk acoustic resonators (FBARs) and upper FBARs, each of the FBARs comprising opposed planar electrodes and a piezoelectric element therebetween, the piezoelectric element characterized by a c-axis, the forming comprising setting the c-axes of the piezoelectric elements of the lower FBARs opposite in direction and setting the c-axes of the upper FBARs opposite in direction, and locating an acoustic decoupler between the lower FBAR and the upper FBAR of each SBAR;

    electrically connecting the lower FBAR of the first SBAR to the lower FBAR of the second SBAR; and

    electrically connecting the upper FBAR of the first SBAR to the upper FBAR of the second SBAR.

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