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Process for manufacturing a triaxial piezoresistive accelerometer and relative pressure-monitoring device

  • US 20060185428A1
  • Filed: 01/24/2006
  • Published: 08/24/2006
  • Est. Priority Date: 01/25/2005
  • Status: Active Grant
First Claim
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1. A manufacturing process of a semiconductor piezoresistive accelerometer, comprising the steps of:

  • providing a wafer of semiconductor material;

    providing a membrane in said wafer on top of a cavity;

    coupling an inertial mass to said membrane; and

    providing, in said wafer, piezoresistive transduction elements sensitive to strains of said membrane and generating corresponding electrical signals;

    wherein said step of coupling comprises forming said inertial mass on top of a surface of said membrane opposite to said cavity.

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