Process for manufacturing a triaxial piezoresistive accelerometer and relative pressure-monitoring device
First Claim
1. A manufacturing process of a semiconductor piezoresistive accelerometer, comprising the steps of:
- providing a wafer of semiconductor material;
providing a membrane in said wafer on top of a cavity;
coupling an inertial mass to said membrane; and
providing, in said wafer, piezoresistive transduction elements sensitive to strains of said membrane and generating corresponding electrical signals;
wherein said step of coupling comprises forming said inertial mass on top of a surface of said membrane opposite to said cavity.
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Accused Products
Abstract
A manufacturing process of a semiconductor piezoresistive accelerometer includes the steps of: providing a wafer of semiconductor material; providing a membrane in the wafer over a cavity; rigidly coupling an inertial mass to the membrane; and providing, in the wafer, piezoresistive transduction elements, that are sensitive to strains of the membrane and generate corresponding electrical signals. The step of coupling is carried out by forming the inertial mass on top of a surface of the membrane opposite to the cavity. The accelerometer is advantageously used in a device for monitoring the pressure of a tire of a vehicle.
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Citations
22 Claims
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1. A manufacturing process of a semiconductor piezoresistive accelerometer, comprising the steps of:
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providing a wafer of semiconductor material;
providing a membrane in said wafer on top of a cavity;
coupling an inertial mass to said membrane; and
providing, in said wafer, piezoresistive transduction elements sensitive to strains of said membrane and generating corresponding electrical signals;
wherein said step of coupling comprises forming said inertial mass on top of a surface of said membrane opposite to said cavity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A semiconductor piezoresistive accelerometer, comprising:
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a body of semiconductor material;
a cavity formed in said body;
a membrane formed in said body and suspended above said cavity;
an inertial mass fixedly coupled to said membrane; and
piezoresistive transduction elements integrated in said body, sensitive to strains of said membrane and generating corresponding electrical signals;
wherein said cavity is buried within said body of semiconductor material, and said inertial mass is arranged on top of a surface of said membrane opposite to said cavity. - View Dependent Claims (10, 11, 12, 13, 14)
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15. A pressure-monitoring device, comprising:
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a pressure sensor;
an electronic circuit connected to said pressure sensor; and
an accelerometer connected to the electronic circuit, the accelerometer including;
a body of semiconductor material;
a cavity formed in said body;
a membrane formed in said body and suspended above said cavity;
an inertial mass fixedly coupled to said membrane; and
piezoresistive transduction elements integrated in said body, sensitive to strains of said membrane and generating corresponding electrical signals;
wherein said cavity is buried within said body of semiconductor material, and said inertial mass is arranged on top of a surface of said membrane opposite to said cavity. - View Dependent Claims (16, 17, 18)
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19. An apparatus for monitoring an inflation pressure of a tire of a vehicle, comprising:
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a pressure sensor;
an electronic circuit connected to said pressure sensor; and
an accelerometer connected to the electronic circuit, the accelerometer including;
a body of semiconductor material;
a cavity formed in said body;
a membrane formed in said body and suspended above said cavity;
an inertial mass fixedly coupled to said membrane; and
piezoresistive transduction elements integrated in said body, sensitive to strains of said membrane and generating corresponding electrical signals;
wherein said cavity is buried within said body of semiconductor material, and said inertial mass is arranged on top of a surface of said membrane opposite to said cavity, wherein said pressure sensor measures the inflation pressure of said tire, and said accelerometer measures a centrifugal acceleration caused by rotations of said tire. - View Dependent Claims (20, 21, 22)
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Specification