Apparatus and method for optical wavefront analysis using active light modulation

• US 20060186312A1
• Filed: 02/23/2005
• Published: 08/24/2006
• Est. Priority Date: 02/23/2005
• Status: Abandoned Application

• Current Assignee: Richard S. Koplin, Zino Altman
• Original Assignee: Richard S. Koplin, Zino Altman
• Inventors: Koplin, Richard S., Altman, Zino
• Application Number:
  US11/065,639
• Publication Number:
  US 20060186312A1
• Time in Patent Office: Days
• US Class Current: 250/201.900
• CPC Class Codes: G01J 9/00 Measuring optical phase difference devices or arrangements for controlling the phase of light beams G02F1/01; Determining degree of coherence; Measuring optical wavelength spectrometry G01J3/00

Abstract

Apparatus and method for measuring wavefront slope and irradiance of direct and/or reflected light beams at a plurality of points to enable calculation of optical wave front distortions. A plurality of sub-beams or groups of sub-beams is created and controlled using at least one electronically-controlled Active Light Modulation Device (“ALMD”).

Claims

1. An apparatus for analyzing variance of an optical wavefront comprising:

an active light modulation device having a multiplicity of elements for dissecting a portion of the wavefront into a plurality of subfronts;

a detector for measuring the optical flux of a subset of the plurality of subfronts; and

,

a central processing unit programmed to calculate the variance of the portion of the wavefront using optical flux measurements from the detector.

2. The apparatus of claim 1 wherein the multiplicity of elements of the active light modulation device comprises individually controllable mirrors.

3. The apparatus of claim 1 wherein the multiplicity of elements of the active light modulation device comprises windows or apertures having micro-mechanical shutters.

4. The apparatus of claim 1 wherein the multiplicity of elements of the active light modulation device comprise translucent windows having controllable transmissivities.

5. The apparatus of claim 1 wherein the active light modulation device is used to expand the portion of the wavefront.

6. The apparatus of claim 1 wherein the active light modulation device is used to contract the portion of the wavefront.

7. The apparatus in claim 1 wherein the detector comprises one or more CCD, CMOS, PSD or PIN type detectors.

8. The apparatus of claim 1 wherein the multiplicity of elements is disposed in a pre-determined image dissection pattern.

9. The apparatus of claim 1 wherein the multiplicity of elements is disposed in an image dissection pattern that is generated by modifying a pre-determined image dissection pattern in accordance with the calculated variance of the portion of the wavefront.

10. The apparatus of claim 1 wherein the optical wavefront is generated by passing a reference wavefront through an optical component.

11. The apparatus of claim 1 wherein the optical wavefront is generated by scattering a reference wavefront from a surface.

12. The apparatus of claim 1 further comprising optics for directing at least a portion of the optical wavefront onto the active light modulation device.

13. A method for analyzing variance of an optical wavefront comprising the steps of:

dissecting at least a portion of the wavefront into a plurality of subfronts using an active light modulation device having a multiplicity of elements;

measuring the optical flux of a subset of the plurality of subfronts using a detector; and

,

calculating the variance of the portion of the wavefront using the optical flux measurements from the detector.

14. The method of claim 13 wherein the multiplicity of elements of the active light modulation device comprises individually controllable mirrors.

15. The method of claim 13 wherein the multiplicity of elements of the active light modulation device comprises windows or apertures having micro-mechanical shutters.

16. The method of claim 13 wherein the multiplicity of elements of the active light modulation device comprises translucent windows having controllable transmissivities.

17. The method of claim 13 further comprising the step of using the active light modulation device to expand the portion of the wavefront.

18. The method of claim 13 further comprising the step of using the active light modulation device to contract the portion of the wavefront.

19. The method of claim 13 wherein the detector comprises one or more CCD, CMOS, PSD or PIN type detectors.

20. The method of claim 13 further comprising the step of disposing the multiplicity of elements in a pre-determined image dissection pattern.

21. The method of claim 13 further comprising the step of disposing the multiplicity of elements in an image dissection pattern that is generated by modifying a pre-determined image dissection pattern in accordance with the calculated variance.

22. The method of claim 13 further comprising the step of generating the optical wavefront by passing a reference wavefront through an optical component.

23. The method of claim 13 further comprising the step of generating the optical wavefront by scattering a reference wavefront from a surface.

24. The method of claim 13 further comprising the step of using optics to direct at least a portion of the optical wavefront onto the active light modulation device.

25. A method for analyzing variance of an optical wavefront comprising the steps of:

dissecting at least a portion of the wavefront into a plurality of subfronts using a first active light modulation device having a multiplicity of elements;

expanding at least one subset of the plurality of subfronts using a second active light modulation device having a second multiplicity of elements;

measuring the optical flux of at least a subset of the expanded subfronts using a detector; and

,

calculating the variance of the portion of the wavefront using optical flux measurements from the detector.

26. The method of claim 25 wherein the multiplicity of elements of at least one of the first or second active light modulation device comprises individually controllable mirrors.

27. The method of claim 25 wherein the multiplicity of elements of at least one of the first or second active light modulation device comprises windows or apertures having micro-mechanical shutters.

28. The method of claim 25 wherein the multiplicity of elements of at least one of the first or second active light modulation device comprises translucent windows having controllable transmissivities.

29. The method of claim 25 wherein the detector comprises one or more CCD, CMOS, PSD or PIN type detectors.

30. The method of claim 25 further comprising the step of disposing at least one of the multiplicity of elements of the first or second active light modulation device in a pre-determined image dissection pattern.

32. The method of claim 25 further comprising the step of generating the optical wavefront by passing a reference wavefront through an optical component.

33. The method of claim 25 further comprising the step of generating the optical wavefront by scattering a reference wavefront from a surface.

34. The method of claim 25 further comprising the step of using optics to direct at least a portion of the optical wavefront onto the first active light modulation device.

31. The method of 25 further comprising the step of disposing at least one of the multiplicity of elements of the first or second active light modulation device in an image dissection pattern that is generated by modifying a pre-determined image dissection pattern in accordance with the calculated variance.