High density interconnect system for IC packages and interconnect assemblies

• US 20060186906A1
• Filed: 02/07/2006
• Published: 08/24/2006
• Est. Priority Date: 05/23/2000
• Status: Active Grant

• Current Assignee: Advantest Corporation
• Original Assignee: NanoNexus Corporation
• Inventors: Mok, Sammy, Chong, Fu Chiung, Modlin, Douglas, Bottoms, W. R.
• Granted Patent: US 7,579,848 B2
• Time in Patent Office: Days
• US Class Current: 324/755.50
• CPC Class Codes: G01R 1/0483 Sockets for un-leaded IC's having matrix type contact fields, e.g. BGA or PGA devices; Sockets for unpackaged, naked chips for IC's with connecting points around the edges only G01R1/0433
• CPC Class Codes: G01R 1/06716 Elastic
• CPC Class Codes: G01R 1/07342 the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
• CPC Class Codes: G01R 1/07378 using an intermediate adapter, e.g. space transformers G01R1/07371 takes precedence
• CPC Class Codes: G01R 3/00 Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments , e.g. of probe tips

Abstract

An improved interconnection system is described, such as for electrical contactors and connectors, electronic device or module package assemblies, socket assemblies, and/or probe card assembly systems. An exemplary connector comprises a first connector structure comprising a contactor substrate having a contact surface and a bonding surface, and one or more electrically conductive micro-fabricated spring contacts extending from the probe surface, a second connector structure comprising at least one substrate and having a set of at least one electrically conductive contact pad located on a connector surface and corresponding to the set of spring contacts, and means for movably positioning and aligning the first connector structure and the second connector structure between at least a first position and a second position, such that in at least one position, at least one electrically conductive micro-fabricated spring contact is electrically connected to at least one electrically conductive contact pad.

Claims

1. An apparatus, comprising:

a first connector structure comprising at least one contactor substrate having a contact surface and a bonding surface, the at least one contactor substrate comprising an array of at least one electrically conductive monolithically formed micro-fabricated stress metal spring contact located on and extending from the contact surface;

a second connector structure comprising a substrate having a first connector surface and a second surface opposite the connector surface, and comprising an array of at least one electrically conductive contact pad located on the first connector surface and corresponding to the array of at least one electrically conductive spring contact, and an array of at least one electrically conductive path extending from the first connector surface to the second surface; and

means for any of movably positioning and aligning the first connector structure and the second connector structure between at least a first position and a second position with respect to each other.

2. The apparatus of claim 1, wherein the means for any of movably positioning and aligning the first connector structure and the second connector structure comprises means for axially positioning any of the first connector structure and the second connector structure.

3. The apparatus of claim 1, further comprising:

means for mechanically affixing the first connector structure and the second connector structure.

4. The apparatus of claim 3, wherein the affixing means is any of temporary, demountable, and permanent.

5. The apparatus of claim 3, wherein the affixing means comprises at least one latchable interface between the first connector structure and the second connector structure.

6. The apparatus of claim 5, wherein the latchable interface comprises at least one latch element associated with any of the first connector structure and the second connector structure.

7. The apparatus of claim 6, wherein the at least one latch element comprises any of a groove, a ridge, a detent, a spring, a fastener, a hole, a catch, and any combination thereof.

8. The apparatus of claim 1, further comprising:

a travel stop associated with and extending from any of the first connector structure and the second connector structure and toward the other of the first connector structure and the second connector structure.

9. The apparatus of claim 1, wherein the at least one contactor substrate further comprises an array of electrically conductive contacts on the bonding surface, and an array of at electrically conductive paths extending from respective electrically conductive spring contacts to corresponding electrically conductive contacts.

10. The apparatus of claim 9, wherein the first connector structure further comprises

a board substrate having a first side and a second side opposite the first side, and a plurality of electrical contacts located on the first side;

and

at least one electrical connection between the board substrate and at least one contact located on the bonding surface of the spring contact substrate, the electrical connection located between at least one of the electrical contacts on the first side of the board substrate and the at least one contact located on the bonding surface of the spring contact substrate.

11. The apparatus of claim 10, wherein the electrical connection between the board substrate and the at least one contact located on the bonding surface of the spring contact substrate comprises any of a solder ball and a solder joint connection.

12. The apparatus of claim 1, wherein in at least one of any of the first position and the second position, at least one electrically conductive spring contact is electrically connected to at least one electrically conductive contact pad.

13. The apparatus of claim 12, further comprising an article of manufacture associated with any the first connector structure and the second connector structure, the article of manufacture having a plurality of operating states, wherein at least one operating state of the article of manufacture is at least partially associated with the respective position of the first connector structure and the second connector structure relative to each other.

14. The apparatus of claim 1, wherein in at least the first position and the second position, at least one electrically conductive spring contact is electrically connected to at least one electrically conductive contact pad.

15. The apparatus of claim 1, wherein fan-out is provided by any of the first connector structure and the second connector structure;

such that for the first connector structure, the at least one contactor substrate further comprises an array of electrically conductive contacts on the bonding surface, and an array of electrically conductive paths extending from respective electrically conductive spring contacts to corresponding electrically conductive contacts, wherein the distance between at least two electrically conductive spring contacts on the contact surface is less than the distance between any of the electrically conductive contacts on the bonding surface; and

such that for the second connector structure, the array of at least one electrically conductive contact pad on the first connector surface of the second connector structure comprises a plurality of electrically conductive contact pads, wherein the second connector structure further comprises an array of electrical contacts on the second surface, wherein that the distance between at least two electrically conductive contact pads on the first connector surface is less than the distance between any of the electrical contacts on the second surface.

16. The apparatus of claim 1, wherein the second connector structure further comprises an array comprising a solder ball located on at least one of the electrically conductive contact pads on the first connector surface.

17. The apparatus of claim 16, wherein the spring contacts define a leading tip;

such that when the first connector structure and the second connector structure are in at least one position proximate to each other, the spring contacts are axially positioned with respect to the solder balls.

18. The apparatus of claim 17, wherein the solder balls define a convex contact surface, and wherein the leading tips are aligned with any of an inclined leading face, horizontal center face and an inclined trailing face of the solder balls.

19. The apparatus of claim 18, wherein at least two of the spring contacts are located to offset respective lateral forces applied to associated solder balls.

20. The apparatus of claim 18, wherein at least two spring contacts are associated with each solder ball.

21. The apparatus of claim 20, wherein at least two of the spring contacts are located to offset respective lateral forces applied between their respective leading tips and associated solder balls.

22. The apparatus of claim 1, wherein the second connector structure further comprises at least one element located on the back surface of the substrate, the element comprising any of a second substrate, a component, a heat sink, and a connector.

23. The apparatus of claim 1, further comprising:

at least one structural element;

wherein the bonding surface of the at least one contactor substrate is in contact with the structural element; and

wherein each of the at least one contactor substrate comprises a package assembly.

24. The apparatus of claim 23, wherein the structural element comprises any of a heat sink, a carrier, and a surface mount package.

25. The apparatus of claim 1, wherein the spring contacts comprise any of flexible springs, compliant springs, and elongate resilient probe elements.

26. The apparatus of claim 1, wherein the contactor substrate comprises any of ceramic, multi-layer ceramic, glass ceramic, glass, quartz, glass epoxy, FR-4, polyimide, a semiconductor wafer, silicon, a printed circuit board, one or more flip chip semiconductor devices, one or more packaged semiconductor devices, a semiconductor integrated circuit, and a hybrid integrated circuit.

27. The apparatus of claim 1, wherein the substrate of the second connector structure comprises any of ceramic, multi-layer ceramic, glass ceramic, glass, quartz, glass epoxy, FR-4, polyimide, a semiconductor wafer, silicon, a printed circuit board, one or more flip chip semiconductor devices, one or more packaged semiconductor devices, a semiconductor integrated circuit, and a hybrid integrated circuit.

28. The apparatus of claim 1, wherein the array of electrically conductive monolithically formed micro-fabricated stress metal spring contacts is either

formed on any of a sacrificial substrate and a temporary substrate and thereafter removed and affixed to the contactor substrate;

or

formed in place on the contactor substrate.

29. A process, comprising the steps of:

providing a first connector structure comprising at least one contactor substrate having a contact surface and a bonding surface, the at least one contactor substrate comprising an array of at least one electrically conductive monolithically formed stress metal spring contact located on and extending from the contact surface;

providing a second connector structure comprising a substrate having a first connector surface and a second surface opposite the connector surface, and comprising an array of at least one electrically conductive contact pad located on the first connector surface and corresponding to the array of at least one electrically conductive spring contact, and an array of at least one electrically conductive path extending from the first connector surface to an outer surface of the second connector structure opposite the connector surface; and

alignably positioning the first connector structure and the second connector structure between at least a first position and a second position with respect to each other.

30. The process of claim 29, further comprising the step of:

mechanically affixing the first connector structure and the second connector structure together.

31. The process of claim 29, wherein the first connector structure and the second connector structure are affixed any of temporarily, demountably and permanently.

32. The process of claim 29, wherein the contact surface of the first connector structure and the first connector surface of the second connector structure are planar to each other.

33. The process of claim 29, wherein the array of electrically conductive monolithically formed micro-fabricated stress metal spring contacts is either

formed on any of a sacrificial substrate and a temporary substrate and thereafter removed and affixed to the contactor substrate;

or

formed in place on the contactor substrate.