Interferometry systems and methods of using interferometry systems
First Claim
1. A method, comprising:
- interferometrically monitoring a distance between an interferometry assembly and a measurement object along each of three different measurement axes while moving the measurement object relative to the interferometry assembly;
monitoring an orientation angle of the measurement object with respect to a rotation axis non-parallel to the three different measurement axes while the measurement object is moving;
determining values of a parameter for different positions of the measurement object from the monitored distances, wherein for a given position the parameter is based on the distances of the measurement object along each of the three different measurement axes at the given position; and
deriving information about a surface figure profile of the measurement object from a frequency transform of at least the parameter values, wherein deriving the information includes accounting for variations of the monitored orientation angle during the measurement object'"'"'s motion.
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Abstract
In general, in one aspect, the invention features methods that include interferometrically monitoring a distance between an interferometry assembly and a measurement object along each of three different measurement axes while moving the measurement object relative to the interferometry assembly. The methods also include monitoring an orientation angle of the measurement object with respect to a rotation axis non-parallel to the three different measurement axes while the measurement object is moving, determining values of a parameter for different positions of the measurement object from the monitored distances, wherein for a given position the parameter is based on the distances of the measurement object along each of the three different measurement axes at the given position, and deriving information about a surface figure profile of the measurement object from a frequency transform of at least the parameter values. Deriving the information includes accounting for variations of the monitored orientation angle during the measurement object'"'"'s motion.
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Citations
29 Claims
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1. A method, comprising:
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interferometrically monitoring a distance between an interferometry assembly and a measurement object along each of three different measurement axes while moving the measurement object relative to the interferometry assembly;
monitoring an orientation angle of the measurement object with respect to a rotation axis non-parallel to the three different measurement axes while the measurement object is moving;
determining values of a parameter for different positions of the measurement object from the monitored distances, wherein for a given position the parameter is based on the distances of the measurement object along each of the three different measurement axes at the given position; and
deriving information about a surface figure profile of the measurement object from a frequency transform of at least the parameter values, wherein deriving the information includes accounting for variations of the monitored orientation angle during the measurement object'"'"'s motion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. An apparatus, comprising:
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a first interferometer assembly configured to produce three output beams each including interferometric information about a distance between the interferometer and a measurement object along a respective axis;
a second interferometer assembly configured to provide information about an orientation angle of the measurement object with respect to a rotation axis non-parallel to the respective axes; and
an electronic processor configured to determine values of a parameter for different positions of the measurement object from the interferometric information, wherein for a given position the parameter is based on the distances of the measurement object along each of the respective measurement axes at the given position, the electronic processor being further configured to derive information about a surface figure profile of the measurement object from a frequency transform of at least the parameter values. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29)
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Specification