Processing information management in a plasma processing tool

• US 20060187713A1
• Filed: 02/18/2005
• Published: 08/24/2006
• Est. Priority Date: 02/18/2005
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Weetman, Chad R.
• Granted Patent: US 7,676,295 B2
• Time in Patent Office: Days
• US Class Current: 365/185.220
• CPC Class Codes: G05B 19/4183 characterised by data acquisition, e.g. workpiece identification
• CPC Class Codes: G05B 2219/31304 Identification of workpiece and data for control, inspection, safety, calibration
• CPC Class Codes: G05B 2219/35391 Sort, order entered data hierarchical
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A computer-implemented method for managing substrate processing data. Substrate process data is acquired while a substrate is processed in a plasma-processing chamber of a cluster tool. The method includes receiving meta-data that identifies at least one of an identification of the substrate and a process. The method further includes receiving from transducers process data streams, each of the process data streams pertaining to a process parameter being monitored. Individual data items in each of the process data streams are being collected in accordance to one of a first methodology and a second methodology. The first methodology represents data collection that is periodic in time. The second methodology represents data collection that happens when predefined events occur. The method also includes storing individual data items associated with process data streams in a single file. The single file stores only data pertaining to a single recipe used to process the substrate.

Claims

1. In a substrate processing environment, a computer-implemented method for managing substrate processing data, said substrate process data being acquired while a substrate is processed in a plasma-processing chamber of a cluster tool, comprising:

receiving meta-data that identifies at least one of an identification of said substrate and a process

receiving from a plurality of transducers a plurality of process data streams, each of said plurality of process data streams pertaining to a process parameter being monitored, individual data items in each of said plurality of process data streams being collected in accordance to one of a first methodology and a second methodology, said first methodology representing data collection that is periodic in time, said second methodology representing data collection that takes place when predefined events occur; and

storing said individual data items associated with said plurality of process data streams in a single file, said single file storing only said substrate process data pertaining to a single recipe that is employed to process said substrate.

2. The method of claim 1 further comprising providing said individual data items pertaining to said plurality of data streams substantially in real time to a real-time process control computer, said real-time process control computer being configured to analyze said individual data items while said substrate is processed to monitor for process irregularities.

3. The method of claim 1 further comprising storing said single file into an archive database, said storing including storing said individual data items associated with said plurality of data streams in a single file of said archive database.

4. The method of claim 3 wherein said archive database represents a relational database.

5. The method of claim 3 further comprising indexing said single file in said archive database to improve searching speed in subsequent searches.

6. The method of claim 3 wherein said storing said single file into said archive database further comprises placing said single file into a processing data hierarchy, said processing data hierarchy comprising files stored as leaf nodes in a tree-like storage arrangement, wherein date represents a parent level of said files, file types represent a grand-parent level of said files, module IDs representing a grand-grand-parent level of said files, and tool IDs representing a grand-grand-grand-parent level of said files.

7. The method of claim 6 wherein said tree-like storage arrangement is navigable on a display screen by a user employing a navigation interface, said navigation interface permitting said user to view said tree-like storage arrangement and to select any of said leaf nodes for viewing.

8. The method of claim 1 further comprising providing said single file to an application, said providing further including compressing said single file prior to transmitting to said application.

9. The method of claim 1 further comprising furnishing said substrate process data to a customer application, said furnishing further including translating said single file into a format suitable for use by said customer application.

10. In a substrate processing environment, a computer-implemented method for managing substrate processing data, said substrate processing data being acquired while a substrate is processed in a plasma-processing chamber of a cluster tool, comprising:

receiving meta-data associated with said substrate, said meta-data further identifying a process recipe employed to process said substrate;

receiving from a plurality of transducers a plurality of process data streams, each of said plurality of process data streams pertaining to a process parameter being monitored; and

employing a single file for storing said individual data items associated with said plurality of process data streams and said meta-data, said single file is not employed for storing substrate process data associated with other recipes, said single file is also not employed for storing substrate process data associated with other substrates.

11. The method of claim 10 further comprising providing said individual data items pertaining to said plurality of data streams substantially in real time to a real-time process control computer, said real-time process control computer being configured to analyze said individual data items while said substrate is processed to monitor for process irregularities.

12. The method of claim 10 further comprising storing said single file into an archive database, said storing including storing said individual data items associated with said plurality of data streams in a single file of said archive database.

13. The method of claim 12 wherein said archive database represents a relational database.

14. The method of claim 12 further comprising indexing said single file in said archive database to improve searching speed in subsequent searches.

15. The method of claim 12 wherein said storing said single file into said archive database further comprises placing said single file into a processing data hierarchy, said processing data hierarchy comprising files stored as leaf nodes in a tree-like storage arrangement, wherein date represents a parent level of said files, file types represent a grand-parent level of said files, module IDs representing a grand-grand-parent level of said files, and tool IDs representing a grand-grand-grand-parent level of said files.

16. The method of claim 15 wherein said tree-like storage arrangement is navigable on a display screen by a user employing a navigation interface, said navigation interface permitting said user to view said tree-like storage arrangement and to select any of said leaf nodes for viewing.

17. The method of claim 10 further comprising providing said single file to an application, said providing further including compressing said single file prior to transmitting to said application.

18. The method of claim 10 further comprising furnishing said substrate processing data to a customer application, said furnishing further including translating said single file into a format suitable for use by said customer application.

19. An article of manufacture comprising a program storage medium having computer readable code embodied therein, said computer readable code being configured for managing substrate processing data in a substrate processing environment, said substrate processing data being acquired while a substrate is processed in a plasma-processing chamber of a cluster tool, comprising:

computer readable code for receiving meta-data associated with said substrate, said meta-data further identifying a process recipe employed to process said substrate;

computer readable code for receiving from a plurality of transducers a plurality of process data streams, each of said plurality of process data streams pertaining to a process parameter being monitored; and

computer readable code for storing said individual data items associated with said plurality of process data streams and said meta-data in a single file, said single file is not employed for storing substrate process data associated with other recipes, said single file is also not employed for storing substrate process data associated with other substrates.

20. The article of manufacture of claim 19 further comprising computer readable code for providing said individual data items pertaining to said plurality of data streams substantially in real time to a real-time process control computer, said real-time process control computer being configured to analyze said individual data items while said substrate is processed to monitor for process irregularities.

21. The article of manufacture of claim 19 further comprising computer readable code for storing said single file into an archive database, said storing including storing said individual data items associated with said plurality of data streams in a single file of said archive database.

22. The article of manufacture of claim 21 wherein said archive database represents a relational database.

23. The article of manufacture of claim 21 further comprising computer readable code for indexing said single file in said archive database to improve searching speed in subsequent searches.

24. The article of manufacture of claim 21 wherein said computer readable code for storing said single file into said archive database further comprises computer readable code for placing said single file into a processing data hierarchy, said processing data hierarchy comprising files stored as leaf nodes in a tree-like storage arrangement, wherein date represents a parent level of said files, file types represent a grand-parent level of said files, module IDs representing a grand-grand-parent level of said files, and tool IDs representing a grand-grand-grand-parent level of said files.

25. The article of manufacture of claim 24 wherein said tree-like storage arrangement is navigable on a display screen by a user employing a navigation interface, said navigation interface permitting said user to view said tree-like storage arrangement and to select any of said leaf nodes for viewing.

26. The article of manufacture of claim 19 further comprising computer readable code for providing said single file to an application, said providing further including compressing said single file prior to transmitting to said application.

27. The article of manufacture of claim 19 further comprising computer readable code for furnishing said substrate processing data to a customer application, said furnishing further including translating said single file into a format suitable for use by said customer application.