Processing information management in a plasma processing tool
First Claim
1. In a substrate processing environment, a computer-implemented method for managing substrate processing data, said substrate process data being acquired while a substrate is processed in a plasma-processing chamber of a cluster tool, comprising:
- receiving meta-data that identifies at least one of an identification of said substrate and a process receiving from a plurality of transducers a plurality of process data streams, each of said plurality of process data streams pertaining to a process parameter being monitored, individual data items in each of said plurality of process data streams being collected in accordance to one of a first methodology and a second methodology, said first methodology representing data collection that is periodic in time, said second methodology representing data collection that takes place when predefined events occur; and
storing said individual data items associated with said plurality of process data streams in a single file, said single file storing only said substrate process data pertaining to a single recipe that is employed to process said substrate.
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Accused Products
Abstract
A computer-implemented method for managing substrate processing data. Substrate process data is acquired while a substrate is processed in a plasma-processing chamber of a cluster tool. The method includes receiving meta-data that identifies at least one of an identification of the substrate and a process. The method further includes receiving from transducers process data streams, each of the process data streams pertaining to a process parameter being monitored. Individual data items in each of the process data streams are being collected in accordance to one of a first methodology and a second methodology. The first methodology represents data collection that is periodic in time. The second methodology represents data collection that happens when predefined events occur. The method also includes storing individual data items associated with process data streams in a single file. The single file stores only data pertaining to a single recipe used to process the substrate.
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Citations
27 Claims
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1. In a substrate processing environment, a computer-implemented method for managing substrate processing data, said substrate process data being acquired while a substrate is processed in a plasma-processing chamber of a cluster tool, comprising:
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receiving meta-data that identifies at least one of an identification of said substrate and a process receiving from a plurality of transducers a plurality of process data streams, each of said plurality of process data streams pertaining to a process parameter being monitored, individual data items in each of said plurality of process data streams being collected in accordance to one of a first methodology and a second methodology, said first methodology representing data collection that is periodic in time, said second methodology representing data collection that takes place when predefined events occur; and
storing said individual data items associated with said plurality of process data streams in a single file, said single file storing only said substrate process data pertaining to a single recipe that is employed to process said substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. In a substrate processing environment, a computer-implemented method for managing substrate processing data, said substrate processing data being acquired while a substrate is processed in a plasma-processing chamber of a cluster tool, comprising:
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receiving meta-data associated with said substrate, said meta-data further identifying a process recipe employed to process said substrate;
receiving from a plurality of transducers a plurality of process data streams, each of said plurality of process data streams pertaining to a process parameter being monitored; and
employing a single file for storing said individual data items associated with said plurality of process data streams and said meta-data, said single file is not employed for storing substrate process data associated with other recipes, said single file is also not employed for storing substrate process data associated with other substrates. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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19. An article of manufacture comprising a program storage medium having computer readable code embodied therein, said computer readable code being configured for managing substrate processing data in a substrate processing environment, said substrate processing data being acquired while a substrate is processed in a plasma-processing chamber of a cluster tool, comprising:
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computer readable code for receiving meta-data associated with said substrate, said meta-data further identifying a process recipe employed to process said substrate;
computer readable code for receiving from a plurality of transducers a plurality of process data streams, each of said plurality of process data streams pertaining to a process parameter being monitored; and
computer readable code for storing said individual data items associated with said plurality of process data streams and said meta-data in a single file, said single file is not employed for storing substrate process data associated with other recipes, said single file is also not employed for storing substrate process data associated with other substrates. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27)
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Specification