Apparatus for controlling semiconductor manufacturing process
First Claim
1. An apparatus for controlling a semiconductor manufacturing process, comprising:
- a filter which receives from semiconductor processing devices first process parameters for processing a wafer and measured data obtained by measuring the wafer, and removes noise from the first process parameters and the measured data;
a model generating unit which receives the first process parameters and the measured data from the filter and generates process models for predicting results of processing the wafer;
a model selecting unit which selects a process model suitable for processing the wafer from a plurality of the process models stored in the model generating unit according to a received request;
a process predicting unit which receives second process parameters for processing the wafer from the semiconductor processing devices, requests and receives the process model from the model selecting unit, and predicts a result of processing the wafer using the received process model; and
a process controlling unit which receives the predicted result from the process predicting unit and controls operations of the semiconductor processing devices.
1 Assignment
0 Petitions
Accused Products
Abstract
An apparatus for controlling a semiconductor manufacturing process includes, a filter which receives from semiconductor processing devices first process parameters for processing a wafer and measured data obtained by measuring the wafer, and removes noise from the first process parameters and the measured data, a model generating unit which receives the first process parameters and the measured data from the filter and generates process models for predicting results of processing the wafer, a model selecting unit which selects a process model suitable for processing the wafer from a plurality of the process models stored in the model generating unit according to a received request, a process predicting unit which receives second process parameters for processing the wafer from the semiconductor processing devices, requests and receives the process model to and from the model selecting unit, and predicts a result of processing the wafer using the received process model, and a process controlling unit which receives the predicted result from the process predicting unit and controls the operations of the semiconductor processing devices.
24 Citations
14 Claims
-
1. An apparatus for controlling a semiconductor manufacturing process, comprising:
-
a filter which receives from semiconductor processing devices first process parameters for processing a wafer and measured data obtained by measuring the wafer, and removes noise from the first process parameters and the measured data;
a model generating unit which receives the first process parameters and the measured data from the filter and generates process models for predicting results of processing the wafer;
a model selecting unit which selects a process model suitable for processing the wafer from a plurality of the process models stored in the model generating unit according to a received request;
a process predicting unit which receives second process parameters for processing the wafer from the semiconductor processing devices, requests and receives the process model from the model selecting unit, and predicts a result of processing the wafer using the received process model; and
a process controlling unit which receives the predicted result from the process predicting unit and controls operations of the semiconductor processing devices. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
-
12. An apparatus for generating a process model, comprising:
-
a plurality of semiconductor processing devices;
a controller, wherein the plurality of semiconductor processing devices transmit process parameters and measured data to the controller and the controller collects the process parameters and the measured data during a predetermined period; and
a semiconductor process controlling apparatus including a model generating unit and a model database, wherein;
the model generating unit receives the process parameters and the measured data from the controller;
the model generating unit removes noise from the process parameters and the measured data;
the model generating unit normalizes and analyzes the process parameters and the measured data;
the model generating unit generates process models using the normalized and analyzed process parameters and measured data; and
the model database stores the process models.
-
-
13. A method for controlling a semiconductor manufacturing process, comprising:
-
transmitting process parameters for performing a wafer manufacturing process to a controller;
transmitting the process parameters to a process predicting unit;
requesting a process model from a model selecting unit;
selecting a process model suitable for a wafer manufacturing process from a model database;
transmitting the selected process model to the process predicting unit;
predicting a process result of a wafer using the selected process model;
transmitting the predicted process result to a process controlling unit;
analyzing the predicted process result to determine whether the predicted process result is bad; and
controlling semiconductor processing devices based on the predicted process result. - View Dependent Claims (14)
-
Specification