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Micromachined apparatus with drive/sensing fingers in coupling levers

  • US 20060191339A1
  • Filed: 02/23/2006
  • Published: 08/31/2006
  • Est. Priority Date: 02/06/2002
  • Status: Active Grant
First Claim
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1. Apparatus comprising:

  • a substrate;

    a plurality of fixed fingers affixed to the substrate; and

    a plurality of resonator structures, the resonator structures including a plurality of masses interconnected by a plurality of levers so as to resonate in anti-phase with one another, the levers including a plurality of lever fingers interdigitated with the fixed fingers for at least one of driving movement of the levers and sensing movement of the levers relative to the fixed fingers.

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