Pressure sensor with expanding member
First Claim
1. A micro-fabricated pressure sensor, comprising:
- a pressure sensing element; and
a free expanding member formed as a result of a connection of a base of the micro-fabricated pressure sensor to a package, such that a connection area therebetween is less than an area of the base, the free expanding member mitigates effects of at least one of temperature induced stress and strains on the pressure sensing element.
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Accused Products
Abstract
Systems and methodologies that provide for multi-parameter sensing via micro fabricated sensing structures operatively connected to oscillators, each micro-fabricated sensing structure in part defines a frequency of a respective associated oscillator. Output from such oscillators can be combined together, and then AC coupled with an incoming DC voltage that feeds the oscillators. The wiring arrangement includes two conducting paths/wires that carry a direct current to the oscillators as well as outputting the combined signal to external measurement devices. In addition, arrangements for pressure sensors are provided that mitigate errors from temperature variations and the induced stress/strains.
17 Citations
20 Claims
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1. A micro-fabricated pressure sensor, comprising:
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a pressure sensing element; and
a free expanding member formed as a result of a connection of a base of the micro-fabricated pressure sensor to a package, such that a connection area therebetween is less than an area of the base, the free expanding member mitigates effects of at least one of temperature induced stress and strains on the pressure sensing element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of measuring a pressure via a pressure sensor comprising:
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connecting a base of the pressure sensor to a package to form a connection area, the connection area smaller than an area of the base; and
forming a free expanding member from the connecting act. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 20)
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19. A micro-fabricated pressure sensor comprising:
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means for forming a free expandable member; and
means for reducing a strain or stress on a sensing means of the pressure sensor.
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Specification