Substrate susceptor for receiving a substrate to be deposited upon

• US 20060191483A1
• Filed: 04/07/2006
• Published: 08/31/2006
• Est. Priority Date: 04/01/2004
• Status: Abandoned Application

• Current Assignee: Eric R. Blomiley, Joel A. Drewes, Nirmal Ramaswamy, Ross S. Dando
• Original Assignee: Eric R. Blomiley, Joel A. Drewes, Nirmal Ramaswamy, Ross S. Dando
• Inventors: Dando, Ross S., Drewes, Joel A., Ramaswamy, Nirmal, Blomiley, Eric R.
• Application Number:
  US11/400,009
• Publication Number:
  US 20060191483A1
• Time in Patent Office: Days
• US Class Current: 118/725
• CPC Class Codes: C23C 16/4586 Elements in the interior of the support, e.g. electrodes, heating or cooling devices

Abstract

This invention includes substrate susceptors which receive substrates to be deposited upon. In one implementation, a substrate susceptor includes a body having a substrate receiving side. The substrate receiving side has a face having a substrate receiving recess formed therein. The recess has an outer peripheral sidewall. At least three projections extend outwardly from a portion of the face. The projections respectively comprise a radially inner sidewall which extends outwardly from the recess outer peripheral sidewall to a projection upper surface. Other aspects and implementations are contemplated.

Claims

1-68. -68. (canceled)

69. A substrate susceptor for receiving a substrate to be deposited upon by thermal deposition comprising back side radiant heating of the susceptor, the susceptor comprising:

a body having a front substrate receiving side and a back side, the front and back sides respectively comprising a face, the front side face having an inner area face over which the substrate to be deposited upon is to be received, the back side face comprising at least one radiation emission-lowering recess received opposite a portion of the front side inner area face over which the substrate to be deposited upon is to be received.

70. The susceptor of claim 69 wherein the at least one radiation emission-lowering recess comprises an annular groove.

71. The susceptor of claim 69 comprising a plurality of said radiation emission-lowering recesses.

72. The susceptor of claim 71 wherein the plurality have a common shape.

73. The susceptor of claim 71 wherein the radiation emission-lowering recesses comprise annular grooves.

74. The susceptor of claim 71 wherein the radiation emission-lowering recesses comprise commonly shaped annular grooves.

75. The susceptor of claim 69 wherein the at least one radiation emission-lowering recess is square in cross section.

76. The susceptor of claim 69 wherein the at least one radiation emission-lowering recess is rectangular in cross section.

77. The susceptor of claim 69 wherein the at least one radiation emission-lowering recess is triangular in cross section.

78. The susceptor of claim 69 wherein the at least one radiation emission-lowering recess includes a curved portion in cross section.

79. The susceptor of claim 78 wherein the at least one radiation emission-lowering recess is half spherical in cross section.

80. The susceptor of claim 69 comprising a plurality of discrete of said radiation emission-lowering recesses formed about an annulus.

81. The susceptor of claim 80 wherein at least some of the plurality of radiation emission-lowering recesses are half spherical in cross section.

82. The susceptor of claim 69 wherein the back side face is substantially planar but for said at least one radiation emission-lowering recess.

83. The susceptor of claim 69 wherein the body has a minimum thickness within the inner area face over which the substrate to be deposited upon is to be received but for said at least one radiation emission-lowering recess, the at least one radiation emission-lowering recess having a depth which is more than half of said minimum thickness.

84. The susceptor of claim 83 wherein the body has constant thickness within at least a majority of the inner area face over which the substrate to be deposited upon is to be received but for said at least one radiation emission-lowering recess.

85. The susceptor of claim 69 wherein the inner area face is defined such that the substrate to be deposited upon extends laterally outside the inner area face.

86. The susceptor of claim 85 wherein the body has constant thickness within all of the inner area face over which the substrate to be deposited upon is to be received but for said at least one radiation emission-lowering recess.

87. The susceptor of claim 69 wherein the substrate susceptor is adapted for receiving a substrate to be deposited upon by thermal deposition comprising back side radiant heating from at least two back side radiation emitting sources which form an overlapped area of back side incident radiation, the at least one radiation emission-lowering recess being received within the overlapped area.

88. The susceptor of claim 69 wherein the front side comprises a substrate receiving recess.

89. A substrate susceptor for receiving a substrate to be deposited upon by thermal deposition comprising back side radiant heating of the susceptor from at least two back side radiation emitting sources which form an overlapped area of back side incident radiation, the susceptor comprising:

a body having a front substrate receiving side and a back side, the front and back sides respectively comprising a face, the front side face having an inner area face over which the substrate to be deposited upon is to be received, the back side face comprising multiple radiation emission-lowering recesses received opposite a portion of the front side inner area face over which the substrate to be deposited upon is to be received and received within the overlapped area.

90. The susceptor of claim 89 wherein the multiple radiation emission-lowering recesses have a common shape.

91. The susceptor of claim 89 wherein the multiple radiation emission-lowering recesses comprise annular grooves.

92. The susceptor of claim 89 wherein the multiple radiation emission-lowering recesses comprise commonly shaped annular grooves.

93. The susceptor of claim 89 wherein the multiple radiation emission-lowering recesses are square in cross section.

94. The susceptor of claim 89 wherein the multiple radiation emission-lowering recesses are rectangular in cross section.

95. The susceptor of claim 89 wherein the multiple radiation emission-lowering recesses are triangular in cross section.

96. The susceptor of claim 89 wherein the multiple radiation emission-lowering recesses include a curved portion in cross section.

97. The susceptor of claim 96 wherein at least some of the multiple radiation emission-lowering recesses are half spherical in cross section.

98. The susceptor of claim 89 comprising a plurality of discrete of said radiation emission-lowering recesses formed about an annulus.

99. The susceptor of claim 98 wherein at least some of the multiple radiation emission-lowering recesses are half spherical in cross section.

100. The susceptor of claim 89 wherein the back side face is substantially planar but for said multiple radiation emission-lowering recesses.

101. The susceptor of claim 89 wherein the body has a minimum thickness within the inner area face over which the substrate to be deposited upon is to be received but for said at least one radiation emission-lowering recess, the respective multiple radiation emission-lowering recesses having a depth which is more than half of said minimum thickness.

102. The susceptor of claim 101 wherein the body has constant thickness within at least a majority of the inner area face over which the substrate to be deposited upon is to be received but for said at least one radiation emission-lowering recess.

103. The susceptor of claim 89 wherein the inner area face is defined such that the substrate to be deposited upon extends laterally outside the inner area face.

104. The susceptor of claim 103 wherein the body has constant thickness within all of the inner area face over which the substrate to be deposited upon is to be received but for said at least one radiation emission-lowering recess.

105-153. -153. (canceled)