Charged particle beam device probe operation
First Claim
1. An apparatus, comprising:
- a positioner controller configured to control positioning of at least one of a device under test (DUT) and a probe within a chamber of a charged particle beam device (CPBD), including positioning control by at least partial automation of at least one of;
orientation of the DUT within the CPBD chamber for examination of the DUT within the CBPD chamber; and
orientation of the probe within the CPBD chamber for examination of at least one of the probe and the DUT; and
relative orientation of the probe and the DUT for establishing contact between the probe and the DUT within the CPBD chamber.
6 Assignments
0 Petitions
Accused Products
Abstract
An apparatus including a positioner control device, a measuring device and a control routine. The positioner control device is communicatively coupled to a chamber of a charged particle beam device (CPBD) and is configured to individually manipulate each of a plurality of probes within the CPBD chamber to establish contact between ones of the plurality of probes and corresponding ones of a plurality of contact points of a sample positioned in the CPBD chamber. The measuring device is communicatively coupled to the CPBD and the positioner control device and is configured to perform one of a measurement and a detection of a characteristic associated with one of the plurality of contact points. The control routine is configured to at least partially automate control of at least one of the CPBD, the positioner control device and the measuring device.
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Citations
25 Claims
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1. An apparatus, comprising:
a positioner controller configured to control positioning of at least one of a device under test (DUT) and a probe within a chamber of a charged particle beam device (CPBD), including positioning control by at least partial automation of at least one of;
orientation of the DUT within the CPBD chamber for examination of the DUT within the CBPD chamber; and
orientation of the probe within the CPBD chamber for examination of at least one of the probe and the DUT; and
relative orientation of the probe and the DUT for establishing contact between the probe and the DUT within the CPBD chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method, comprising:
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transferring a probe to a chamber of a charged particle beam device (CPBD);
establishing contact between the probe and a contact point of a device under test (DUT) positioned within the CPBD chamber; and
measuring a characteristic of the DUT while the probe is contacting the DUT contact point;
wherein at least one of the transferring, the establishing and the measuring is via substantial automation. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. An apparatus, comprising:
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a positioner control device communicatively coupled to a chamber of a charged particle beam device (CPBD) and configured to individually manipulate each of a plurality of probes within the CPBD chamber to establish contact between ones of the plurality of probes and corresponding ones of a plurality of contact points of a sample positioned in the CPBD chamber;
a measuring device communicatively coupled to the CPBD and the positioner control device and configured to perform one of a measurement and a detection of a characteristic associated with one of the plurality of contact points; and
a control routine configured to at least partially automate control of at least one of the CPBD, the positioner control device and the measuring device. - View Dependent Claims (24, 25)
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Specification