Shredded parallel stacked inductor
First Claim
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1. A shredded parallel stacked inductor comprising:
- a substrate;
an oxide film formed on the substrate;
a plurality of metallic layers spirally formed within the oxide film; and
a plurality of vias formed in regions of the plurality of metallic layers to join the plurality of metallic layers in parallel, wherein a spiral cavity is formed in the plurality of metallic layers.
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Abstract
A shredded parallel stacked inductor is provided. The shredded parallel stacked inductor includes a substrate, an oxide film formed on the substrate, metallic layers spirally formed within the oxide film, and vias formed in regions of the metallic layers to join the metallic layers in parallel, thus forming a spiral cavity in a center part of the metallic layers.
78 Citations
8 Claims
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1. A shredded parallel stacked inductor comprising:
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a substrate;
an oxide film formed on the substrate;
a plurality of metallic layers spirally formed within the oxide film; and
a plurality of vias formed in regions of the plurality of metallic layers to join the plurality of metallic layers in parallel, wherein a spiral cavity is formed in the plurality of metallic layers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification