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Shredded parallel stacked inductor

  • US 20060192645A1
  • Filed: 02/15/2006
  • Published: 08/31/2006
  • Est. Priority Date: 02/15/2005
  • Status: Active Grant
First Claim
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1. A shredded parallel stacked inductor comprising:

  • a substrate;

    an oxide film formed on the substrate;

    a plurality of metallic layers spirally formed within the oxide film; and

    a plurality of vias formed in regions of the plurality of metallic layers to join the plurality of metallic layers in parallel, wherein a spiral cavity is formed in the plurality of metallic layers.

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