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Inspection method semiconductor device and display device

  • US 20060192752A1
  • Filed: 07/16/2004
  • Published: 08/31/2006
  • Est. Priority Date: 07/22/2003
  • Status: Abandoned Application
First Claim
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1. A test method for a semiconductor substrate in which pixel cell drive circuits each including a pixel switch and a pixel capacitor that is coupled to the pixel switch and holds pixel data are arranged in a matrix corresponding to intersections between data lines and pixel switch control lines, the method comprising:

  • a test drive step of selecting two or more of the data lines or two or more of the pixel switch control lines according to an interconnect layout structure on the semiconductor substrate and/or a test item, and applying to each of the selected data lines or each of the selected pixel switch control lines a test drive signal that has a level corresponding to a required logical value, the level being set according to operation expression of logical operation executed in a logical operation step; and

    a logical operation step of inputting as a logical value an output of a potential arising in each of the selected two or more data lines or each of the selected two or more pixel switch control lines, and executing logical operation in accordance with operation expression determined according to the layout structure and/or the test item.

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