Method and system for constrained pixel graytones interpolation for pattern rasterization
First Claim
1. A rasterization method, comprising:
- (a) calculating a first set of graytones for a set of pixels, the first set of graytones corresponding to a center of a pattern being located at a first grid position;
(b) calculating a second set of graytones for the set of pixels, the second set of graytones corresponding to the center of the pattern being located at a second grid position; and
(c) linearly interpolating with constraints, from the first and second set of graytones, a plurality of sets of graytones for the set of pixels, the plurality of sets of graytones corresponding to the pattern being shifted by a continuous shift-amount between the first grid position and the second grid position.
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Abstract
A method and system for preparing data to be used by a patterning device. The method including the following steps: a first set of graytones for a set of pixels is calculated, the first set of graytones corresponding to a center of a pattern being located at a first grid position, and a second set of graytones for the set of pixels is calculated, the second set of graytones corresponding to the center of the pattern being located at a second grid position. A plurality of sets of graytones for the set of pixels is linearly interpolated with constraints, from the first and second set of graytones, the plurality of sets of graytones corresponding to the pattern being shifted by a continuous shift-amount between the first grid position and the second grid position.
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Citations
18 Claims
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1. A rasterization method, comprising:
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(a) calculating a first set of graytones for a set of pixels, the first set of graytones corresponding to a center of a pattern being located at a first grid position;
(b) calculating a second set of graytones for the set of pixels, the second set of graytones corresponding to the center of the pattern being located at a second grid position; and
(c) linearly interpolating with constraints, from the first and second set of graytones, a plurality of sets of graytones for the set of pixels, the plurality of sets of graytones corresponding to the pattern being shifted by a continuous shift-amount between the first grid position and the second grid position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A system, comprising:
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a computing module that computes a first and second set of graytones for a set of pixels, the first and second set of graytones corresponding to a center of a pattern being located at a first and second grid position, respectively; and
an interpolator that linearly interpolates with constraints, from the first and second set of graytones, a plurality of sets of graytones for the set of pixels, the plurality of sets of graytones corresponding to the pattern being shifted by a continuous shift-amount between the first grid position and the second grid position. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification