METHOD AND APPARATUS FOR MASKLESS PHOTOLITHOGRAPHY

• US 20060192932A1
• Filed: 04/07/2003
• Published: 08/31/2006
• Est. Priority Date: 06/27/2001
• Status: Active Grant

• Current Assignee: University of South Florida (State University System of Florida)
• Original Assignee: University of South Florida (State University System of Florida)
• Inventors: Fries, David P.
• Granted Patent: US 7,095,484 B1
• Time in Patent Office: Days
• US Class Current: 355/67
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices

Abstract

A method and apparatus to create two dimensional and three dimensional structures using a maskless photolithography system that is semi-automated, directly reconfigurable, and does not require masks, templates or stencils to create each of the planes or layers on a multi layer two-dimensional or three dimensional structure. In an embodiment, the pattern generator comprises a micromirror array wherein the positioning of the mirrors in the micromirror array and the time duration of exposure can be modulated to produce gray scale patterns to photoform layers of continuously variable thickness. The desired pattern can be designed and stored using conventional computer aided drawing techniques and can be used to control the positioning of the individual mirrors in the micromirror array to reflect the corresponding desired pattern. A fixture for mounting of the substrate can be incorporated and can allow the substrate to be moved three dimensions. The fixture can be rotated in one, two, or three directions.

Claims

1-90. -90. (canceled)

91. A maskless photolithography system for photoforming photosensitive materials using gray scale photolithography comprising:

a. a computer system for generating mask patterns and alignment instructions;

b. a gray scale mask pattern controller, operably connected to said computer system, for receiving said mask patterns from said computer system and modulating said mask patterns using time modulation to provide a gray scale mask pattern; and

c. a gray scale patterned light generator, operably connected to said gray scale pattern controller, for receiving said gray scale mask patterns and radiating a gray scaled patterned light beam;

wherein the photosensitive material is exposed to said gray scaled patterned light beam, wherein said gray scaled patterned light beam is time modulated.

92. The system of claim 91, wherein said gray scaled patterned light beam incident on the photosensitive material variably photosculpts the photosensitive material to create patterns of continuously variable thickness corresponding to said gray scaled patterned light beam.

93. The system of claim 91, wherein said gray scaled patterned light beam incident on the photosensitive material variably photosculpts the photosensitive material to create patterns of continuously variable composition corresponding to said gray scaled patterned light beam.

94. The system of claim 91, wherein said gray scale mask pattern controller is incorporated in said computer system.

95. The system of claim 91, wherein said gray scaled patterned light generator comprises:

a. an array of positionable micromirrors, wherein said micromirrors reflect light according to said gray scale mask patterns provided by said gray scale mask pattern controller by varying the angular position of each of said micromirrors to reflect light towards or away from the photosensitive material, wherein the duration of exposure of the photosensitive material to said gray scaled patterned light beam is controlled by said gray scale mask pattern controller by varying the angular position of said micromirrors to modulate the intensity of said gray scaled patterned light reflected to the photosensitive material to achieve gray scale photosculpting of the photosensitive material; and

b. an optical system for generating and directing the light beam to said micromirror array.

96. The system of claim 95, further comprising:

an optical system for collimating the gray scale patterned light beam reflected from said micromirror array and directing said patterned light beam onto the photosensitive materials to create patterns on the photosensitive material corresponding to said gray scale mask patterns incident on the photosensitive material.

100. The system of claim 91, wherein said gray scaled patterned light generator comprises:

a. a plasma display device, having individually addressable pixels, operably connected to and controllable by said computer system, wherein said display generates said patterned light beam corresponding to said gray mask patterns provided by said computer system to expose the photosensitive material, wherein the intensity and duration of exposure of the photosensitive material to said gray scaled patterned light beam is controlled by said gray scale mask pattern controller to achieve gray scale photosculpting of the photosensitive material;

b. an optical system for generating and directing the light beam to said plasma display device.

101. The system of claim 100, further comprising:

an optical system for collimating the gray scale patterned light beam generated by said plasma display device and directing said patterned light beam onto the photosensitive materials to create patterns on the photosensitive material corresponding to said gray scale mask patterns incident on the photosensitive material.

102. The system of claim 91, further comprising:

a manually controlled alignment fixture for detachably mounting the photosensitive material, wherein said alignment fixture is movable in coplanar first and second dimensions, and in a third dimension direction substantially perpendicular to said first and second coplanar dimensions and substantially parallel to said patterned light beam;

said fixture providing three dimensional alignment of the photosensitive material beneath said patterned light beam, wherein said alignment fixture is moved in three dimensions in response to mechanical alignments directly provided by a user.

103. The system of claim 91, further comprising:

an alignment fixture for mounting the photosensitive material, wherein said alignment fixture allows alignment of the photosensitive material in coplanar first and second dimensions, and in a third dimension substantially perpendicular to the first and second coplanar dimensions.

104. The system of claim 102, further comprising:

a means for controlling the rotation of the alignment fixture in at least a first direction such that controlling the rotation of the alignment fixture in at least a first direction controls the rotation of the photosensitive material in the at least first direction.

105. The system of claim 104, wherein the means for controlling the rotation of the alignment fixture in at least a first direction controls the rotation of the alignment fixture in a first direction, controls the rotation of the alignment fixture in a second direction perpendicular to the first direction, and controls the rotation of the alignment fixture in a third direction perpendicular to both the first direction and the second direction.

106. The system according to claim 103, wherein the means for controlling the position of the alignment fixture is interconnected with the computer system such that control of the position of the alignment fixture is coordinated with control of the gray scale patterned light generator.

107. The system according to 104,

wherein the means for controlling the rotation of the alignment fixture in at least a first direction is interconnected with the computer system such that control of the rotation of the alignment fixture is coordinated with control of the gray scale patterned light generator.

108. The system of claim 91, further comprising a computer controlled pattern alignment system, for providing electrical alignment of said patterns in coplanar first and second dimensions, wherein said pattern alignment system adjusts the alignment of said mask patterns in coplanar first and second dimensions in response to instructions provided by said computer according to said alignment information, so that said pattern is shifted in at least one coplanar direction.

109. The system of claim 91, further comprising an optical viewer to allow optical monitoring of positioning of the photosensitive material mounted in said alignment fixture by visually verifying that an image projected on the immersed substrate is properly aligned.

110. The system of claim 91, further comprising an optical filter, removably mounted in the light beam to selectively filter light impinging on the photosensitive material to prevent exposure of the photosensitive material during an alignment procedure.

144. The system of claim 91, wherein the gray scale mask pattern controller utilizes a pulse width modulation scheme to modulate the mask pattern.

145. The system of claim 91, further comprising:

a means for controlling the rotation of the alignment fixture in at least a first direction such that controlling the rotation of the alignment fixture in at least a first direction controls the rotation of the photosensitive material in the at least first direction.

146. The system of claim 145, wherein the means for controlling the rotation of the alignment fixture in at least a first direction controls the rotation of the alignment fixture in a first direction, controls the rotation of the alignment fixture in a second direction perpendicular to the first direction, and controls the rotation of the alignment fixture in a third direction perpendicular to both the first direction and the second direction.

147. The system according to 145, wherein the means for controlling the rotation of the alignment fixture in at least a first direction is interconnected with the computer system such that control of the rotation of the alignment fixture is coordinated with control of the gray scale patterned light generator.

148. The system of claim 145, wherein the means for controlling the rotation of the alignment fixture in at least a first direction controls the rotation of the photosensitive material in the first direction.

149. The system of claim 148, wherein the means for controlling the rotation of the alignment fixture in at least a first direction controls the rotation of the alignment fixture in a second direction perpendicular the first direction.

150. The system of claim 91, wherein the gray scale mask pattern controller further modulates the mask patterns using spatial modulation.

111. A method for maskless photolithography for photoforming photosensitive materials using gray scale photolithography comprising:

a. receiving mask pattern information corresponding to a desired pattern to be created on the photosensitive material;

b. generating mask patterns based on received said mask pattern information;

c. receiving gray scale information corresponding to a desired gray scale pattern to be created on the photosensitive material;

d. generating gray scaled mask patterns based on said mask pattern information and said gray scale information, wherein generating gray scaled mask patterns comprises applying a time modulation scheme to the mask patterns;

d. providing said gray scale mask patterns to a patterned light generator;

e. generating a gray scale patterned light beam;

f. directing said gray scale patterned light beam onto the photosensitive material; and

g. exposing the photosensitive material to said gray scale patterned light beam, wherein said gray scaled patterned light beam is time modulated.

112. The method according to claim 111, wherein said gray scaled patterned light beam incident on the photosensitive material variably photosculpts the photosensitive material to create patterns of continuously variable thickness corresponding to said gray scale patterned light beam.

113. The method according to claim 111, wherein said gray scaled patterned light beam incident on the photosensitive material variably photosculpts the photosensitive material to create patterns of continuously variable composition corresponding to said gray scale patterned light beam.

114. The method of claim 111, wherein generating said gray scale patterned light beam further comprises:

a. receiving said gray scale mask patterns at an array of positionable micromirrors;

b. generating, collimating, and directing a light beam to said micromirror array;

c. positioning said micromirrors to reflect the light beam from said micromirror array according to said gray scale mask patterns;

d. varying the angular position of said micromirrors to modulate the time duration of said gray scaled patterned light reflected to the photosensitive material; and

e. collimating said patterned light beam reflected from said micromirror array.

115. The method of claim 111, wherein generating said patterned light beam further comprises:

a. receiving said mask patterns at a variably transmissive filter array device having individually addressable pixels;

b. activating the pixels of said variably transmissive filter array device to generate a gray scale patterned light beam corresponding to said gray scale mask patterns; and

c. collimating said patterned light beam generated by said variably transmissive filter array device.

116. The method of claim 111, further comprising:

a. providing selective filtering of said gray scale patterned light beam impinging on the photosensitive material to prevent exposure of the photosensitive material during an alignment procedure;

b. allowing alignment of the photosensitive material under said patterned light beam by moving said mounted photosensitive material in three dimensions, wherein the photosensitive material is moved in coplanar first and second dimensions, and moved in a third dimension direction substantially perpendicular to said first and second coplanar dimensions, and substantially parallel to the patterned light beam;

c. allowing optical monitoring of positioning of the photosensitive material under the gray scale patterned light beam to visually verify that an image projected on the photosensitive material is properly aligned;

d. receiving alignment information corresponding to alignment of a desired mask pattern projected onto the photosensitive material;

e. generating alignment instructions based on received said alignment information;

f. providing alignment instructions, based on said alignment information, to said patterned light generator to further align said gray scale mask patterns in the coplanar first and second dimensions;

g. adjusting said micromirror array according to said alignment instructions by shifting the gray scale mask pattern in at least one of the coplanar first and second dimensions;

h. disabling filtering of said gray scale patterned light beam;

i. exposing the photosensitive material; and

j. repeating steps (a-i) to create a desired pattern on the photosensitive material.

117. The method according to claim 116,

wherein allowing alignment of the photosensitive material under said patterned light beam comprises allowing automatically controlled alignment of the photosensitive material under said patterned light beam.

151. The method of claim 111, wherein applying a time modulation scheme to the mask patterns comprises applying a pulse width modulation scheme to the mask patterns.

118. A computer system for maskless photolithography for photoforming photosensitive materials using gray scale photolithography comprising:

a. a computing device comprising a display, a central processing unit (CPU), operating system software, memory for storing data, a user interface, and input/output capability for reading and writing data;

said computing device operably connected to and operating in conjunction with a maskless patterned light generator;

b. computer program code for;

1) receiving mask pattern information corresponding to a desired pattern to be created on an object;

2) generating said mask patterns based on received mask pattern information; and

3) providing said mask patterns to a gray scale mask pattern controller, wherein the gray scale mask pattern controller modulates said mask patterns using time modulation;

whereby said computing device operates in conjunction with said maskless photolithography system and executes said computer code to provide mask patterns to said gray scale mask pattern controller.

119. The computer system of claim 118, wherein said computer system further comprises:

a. a gray scale mask pattern controller to further process said mask patterns to include gray scale control information and output gray scale mask patterns; and

b. computer code for;

1) receiving gray scale information corresponding to a desired gray scale pattern to be created on an object;

2) generating gray scale mask patterns based on received said gray scale information, wherein generating gray scale mask patterns comprises applying a time modulation scheme to said mask patterns; and

3) providing said gray scale mask patterns to a gray scale pattern generator.

152. The computer system of claim 119, wherein applying a time modulation scheme to the mask patterns comprises applying a pulse width modulation scheme to the mask patterns.

120. A computer program product recorded on computer readable medium for a maskless photolithography system comprising:

a. computer readable medium for receiving mask pattern information corresponding to a desired pattern to be created on the photosensitive material;

b. computer readable medium for generating mask patterns based on received said mask pattern information;

c. computer readable medium for receiving gray scale information corresponding to a desired gray scale pattern to be created on the photosensitive material;

d. computer readable medium for generating gray scaled mask patterns based on said mask pattern information and said gray scale information;

d. computer readable medium for providing said gray scale mask patterns to a patterned light generator;

e. computer readable medium for generating a gray scale patterned light beam, wherein the gray scale patterned light beam is time modulated;

f. computer readable medium for directing said gray scale patterned light beam onto the photosensitive material; and

g. computer readable medium for exposing the photosensitive material to said gray scale patterned light beam.

121. The computer program product of claim 120,

wherein said gray scaled patterned light beam incident on the photosensitive material variably photosculpts the photosensitive material to create patterns of continuously variable thickness corresponding to said gray scale patterned light beam.

122. The computer program product of claim 120,

wherein said gray scaled patterned light beam incident on the photosensitive material variably photosculpts the photosensitive material to create patterns of continuously variable composition corresponding to said gray scale patterned light beam.

123-142. -142. (canceled)

143. A computer program product recorded on computer readable medium for a maskless photolithography system comprising:

a. computer readable medium for receiving mask pattern information and alignment information corresponding to a desired pattern to be created on the photosensitive material;

b. computer readable medium for generating mask patterns based on received mask pattern information and alignment information;

c. computer readable medium for providing said mask patterns to a patterned light generator;

d. computer readable medium for generating a patterned light beam;

e. computer readable medium for directing said patterned light beam onto a first exposure area of the photosensitive material;

f. computer readable medium for exposing the first exposure area of the photosensitive material to said gray scale patterned light beam, wherein said gray scale patterned light beam is time modulated;

g. computer readable medium for providing relative movement of the photosensitive material and the maskless photolithography system to allow exposure of a second exposure area; and

h. computer readable medium for repeating steps a-g to sequentially expose the entire surface of the photosensitive material;

wherein said patterned light beam incident on the photosensitive material photosculpts the photosensitive material to create contiguous patterns by sequential exposure corresponding to said patterned light beam.

153. A maskless photolithography system for photoforming photosensitive materials using gray scale photolithography comprising:

a. a computer system for generating mask patterns and alignment instructions;

b. a gray scale mask pattern controller, operably connected to said computer system, for receiving said mask patterns from said computer system and modulating said mask patterns using intensity modulation to provide a gray scale mask pattern; and

c. a gray scale patterned light generator, operably connected to said gray scale pattern controller, for receiving said gray scale mask patterns and radiating a gray scaled patterned light beam;

wherein the photosensitive material is exposed to said gray scaled patterned light beam, wherein said gray scaled patterned light beam is intensity modulated.

97. The system of claim 153, wherein said gray scaled patterned light generator comprises:

a. a variably transmissive filter array device having individually addressable pixels, capable of being addressed to be opaque, to prevent light transmission, and capable of being addressed to be transparent, to allow light transmission, wherein said variably transmissive filter array device prevents light transmission by causing said pixels to be in an opaque state or a transparent state according to said gray scale mask patterns provided by said gray scale mask pattern controller, wherein the intensity of said gray scaled patterned light transmitted to the photosensitive material is varied by modulating the transmissive properties of said variably transmissive filter array device to achieve gray scale photosculpting of the photosensitive material;

b. an optical system for generating and directing the light beam to said variably transmissive filter array device.

98. The system of claim 97, further comprising:

an optical system for collimating the gray scale patterned light beam transmitted by said variably transmissive filter array device and directing said patterned light beam onto the photosensitive materials to create patterns on the photosensitive material corresponding to said gray scale mask patterns incident on the photosensitive material.

99. The system of claim 97, wherein the variably transmissive filter array device comprises Liquid Crystal Display (LCD) pixels.

154. The system of claim 153, wherein the gray scale mask pattern controller further modulates the mask patterns using spatial modulation.

155. The system of claim 153, wherein said gray scaled patterned light beam incident on the photosensitive material variably photosculpts the photosensitive material to create patterns of continuously variable thickness corresponding to said gray scaled patterned light beam.

156. The system of claim 153, wherein said gray scaled patterned light beam incident on the photosensitive material variably photosculpts the photosensitive material to create patterns of continuously variable composition corresponding to said gray scaled patterned light beam.

157. The system of claim 153, wherein said gray scale mask pattern controller is incorporated in said computer system.

158. The system of claim 153, wherein said gray scaled patterned light generator comprises:

a. a plasma display device, having individually addressable pixels, operably connected to and controllable by said computer system, wherein said display generates said patterned light beam corresponding to said gray mask patterns provided by said computer system to expose the photosensitive material, wherein the intensity and duration of exposure of the photosensitive material to said gray scaled patterned light beam is controlled by said gray scale mask pattern controller to achieve gray scale photosculpting of the photosensitive material;

b. an optical system for generating and directing the light beam to said plasma display device.

159. The system of claim 158, further comprising:

an optical system for collimating the gray scale patterned light beam generated by said plasma display device and directing said patterned light beam onto the photosensitive materials to create patterns on the photosensitive material corresponding to said gray scale mask patterns incident on the photosensitive material.

160. The system of claim 153, further comprising:

a manually controlled alignment fixture for detachably mounting the photosensitive material, wherein said alignment fixture is movable in coplanar first and second dimensions, and in a third dimension direction substantially perpendicular to said first and second coplanar dimensions and substantially parallel to said patterned light beam;

said fixture providing three dimensional alignment of the photosensitive material beneath said patterned light beam, wherein said alignment fixture is moved in three dimensions in response to mechanical alignments directly provided by a user.

161. The system of claim 160, further comprising:

a means for controlling the rotation of the alignment fixture in at least a first direction such that controlling the rotation of the alignment fixture in at least a first direction controls the rotation of the photosensitive material in the at least first direction.

162. The system of claim 161, wherein the means for controlling the rotation of the alignment fixture in at least a first direction controls the rotation of the alignment fixture in a first direction, controls the rotation of the alignment fixture in a second direction perpendicular to the first direction, and controls the rotation of the alignment fixture in a third direction perpendicular to both the first direction and the second direction.

163. The system according to 161,

wherein the means for controlling the rotation of the alignment fixture in at least a first direction is interconnected with the computer system such that control of the rotation of the alignment fixture is coordinated with control of the gray scale patterned light generator.

164. The system of claim 153, further comprising:

an alignment fixture for mounting the photosensitive material, wherein said alignment fixture allows alignment of the photosensitive material in coplanar first and second dimensions, and in a third dimension substantially perpendicular to the first and second coplanar dimensions.

165. The system according to claim 164, wherein the means for controlling the position of the alignment fixture is interconnected with the computer system such that control of the position of the alignment fixture is coordinated with control of the gray scale patterned light generator.

166. The system of claim 153, further comprising a computer controlled pattern alignment system, for providing electrical alignment of said patterns in coplanar first and second dimensions, wherein said pattern alignment system adjusts the alignment of said mask patterns in coplanar first and second dimensions in response to instructions provided by said computer according to said alignment information, so that said pattern is shifted in at least one coplanar direction.

167. The system of claim 153, further comprising an optical viewer to allow optical monitoring of positioning of the photosensitive material mounted in said alignment fixture by visually verifying that an image projected on the immersed substrate is properly aligned.

168. The system of claim 153, further comprising an optical filter, removably mounted in the light beam to selectively filter light impinging on the photosensitive material to prevent exposure of the photosensitive material during an alignment procedure.

169. The system of claim 153, further comprising:

a means for controlling the rotation of the alignment fixture in at least a first direction such that controlling the rotation of the alignment fixture in at least a first direction controls the rotation of the photosensitive material in the at least first direction.

170. The system of claim 169, wherein the means for controlling the rotation of the alignment fixture in at least a first direction controls the rotation of the alignment fixture in a first direction, controls the rotation of the alignment fixture in a second direction perpendicular to the first direction, and controls the rotation of the alignment fixture in a third direction perpendicular to both the first direction and the second direction.

171. The system according to 169, wherein the means for controlling the rotation of the alignment fixture in at least a first direction is interconnected with the computer system such that control of the rotation of the alignment fixture is coordinated with control of the gray scale patterned light generator.

172. The system of claim 169, wherein the means for controlling the rotation of the alignment fixture in at least a first direction controls the rotation of the photosensitive material in the first direction.

173. The system of claim 172, wherein the means for controlling the rotation of the alignment fixture in at least a first direction controls the rotation of the alignment fixture in a second direction perpendicular the first direction.

174. A method for maskless photolithography for photoforming photosensitive materials using gray scale photolithography comprising:

a. receiving mask pattern information corresponding to a desired pattern to be created on the photosensitive material;

b. generating mask patterns based on received said mask pattern information;

c. receiving gray scale information corresponding to a desired gray scale pattern to be created on the photosensitive material;

d. generating gray scaled mask patterns based on said mask pattern information and said gray scale information, wherein generating gray scaled mask patterns comprises applying an intensity modulation scheme to the mask patterns;

d. providing said gray scale mask patterns to a patterned light generator;

e. generating a gray scale patterned light beam;

f. directing said gray scale patterned light beam onto the photosensitive material; and

g. exposing the photosensitive material to said gray scale patterned light beam, wherein said gray scaled patterned light beam is intensity modulated.

175. The method according to claim 174, wherein said gray scaled patterned light beam incident on the photosensitive material variably photosculpts the photosensitive material to create patterns of continuously variable thickness corresponding to said gray scale patterned light beam.

176. The method according to claim 174, wherein said gray scaled patterned light beam incident on the photosensitive material variably photosculpts the photosensitive material to create patterns of continuously variable composition corresponding to said gray scale patterned light beam.

177. The method of claim 174, wherein generating said gray scale patterned light beam further comprises:

a. receiving said gray scale mask patterns at an array of positionable micromirrors;

b. generating, collimating, and directing a light beam to said micromirror array;

c. positioning said micromirrors to reflect the light beam from said micromirror array according to said gray scale mask patterns;

d. varying the angular position of said micromirrors to modulate the intensity of said gray scaled patterned light reflected to the photosensitive material; and

e. collimating said patterned light beam reflected from said micromirror array.

178. The method of claim 174, wherein generating said patterned light beam further comprises:

a. receiving said mask patterns at a variably transmissive filter array device having individually addressable pixels;

b. activating the pixels of said variably transmissive filter array device to generate a gray scale patterned light beam corresponding to said gray scale mask patterns; and

c. collimating said patterned light beam generated by said variably transmissive filter array device.

179. The method of claim 174, further comprising:

a. providing selective filtering of said gray scale patterned light beam impinging on the photosensitive material to prevent exposure of the photosensitive material during an alignment procedure;

b. allowing alignment of the photosensitive material under said patterned light beam by moving said mounted photosensitive material in three dimensions, wherein the photosensitive material is moved in coplanar first and second dimensions, and moved in a third dimension direction substantially perpendicular to said first and second coplanar dimensions, and substantially parallel to the patterned light beam;

c. allowing optical monitoring of positioning of the photosensitive material under the gray scale patterned light beam to visually verify that an image projected on the photosensitive material is properly aligned;

d. receiving alignment information corresponding to alignment of a desired mask pattern projected onto the photosensitive material;

e. generating alignment instructions based on received said alignment information;

f. providing alignment instructions, based on said alignment information, to said patterned light generator to further align said gray scale mask patterns in the coplanar first and second dimensions;

g. adjusting said micromirror array according to said alignment instructions by shifting the gray scale mask pattern in at least one of the coplanar first and second dimensions;

h. disabling filtering of said gray scale patterned light beam;

i. exposing the photosensitive material; and

j. repeating steps (a-i) to create a desired pattern on the photosensitive material.

180. The method according to claim 179,

wherein allowing alignment of the photosensitive material under said patterned light beam comprises allowing automatically controlled alignment of the photosensitive material under said patterned light beam.

181. A computer system for maskless photolithography for photoforming photosensitive materials using gray scale photolithography comprising:

a. a computing device comprising a display, a central processing unit (CPU), operating system software, memory for storing data, a user interface, and input/output capability for reading and writing data;

said computing device operably connected to and operating in conjunction with a maskless patterned light generator;

b. computer program code for;

1) receiving mask pattern information corresponding to a desired pattern to be created on an object;

2) generating said mask patterns based on received mask pattern information; and

3) providing said mask patterns to a gray scale mask pattern controller, wherein the gray scale mask pattern controller modulates said mask patterns using intensity modulation;

whereby said computing device operates in conjunction with said maskless photolithography system and executes said computer code to provide mask patterns to said gray scale mask pattern controller.

182. The computer system of claim 181, wherein said computer system further comprises:

a. a gray scale mask pattern controller to further process said mask patterns to include gray scale control information and output gray scale mask patterns; and

b. computer code for;

1) receiving gray scale information corresponding to a desired gray scale pattern to be created on an object;

2) generating gray scale mask patterns based on received said gray scale information, wherein generating gray scale mask patterns comprises applying an intensity modulation scheme to said mask patterns; and

3) providing said gray scale mask patterns to a gray scale pattern generator.

183. A computer program product recorded on computer readable medium for a maskless photolithography system comprising:

a. computer readable medium for receiving mask pattern information corresponding to a desired pattern to be created on the photosensitive material;

b. computer readable medium for generating mask patterns based on received said mask pattern information;

c. computer readable medium for receiving gray scale information corresponding to a desired gray scale pattern to be created on the photosensitive material;

d. computer readable medium for generating gray scaled mask patterns based on said mask pattern information and said gray scale information;

d. computer readable medium for providing said gray scale mask patterns to a patterned light generator;

e. computer readable medium for generating a gray scale patterned light beam, wherein the gray scale patterned light beam is intensity modulated;

f. computer readable medium for directing said gray scale patterned light beam onto the photosensitive material; and

g. computer readable medium for exposing the photosensitive material to said gray scale patterned light beam.

184. The computer program product of claim 183,

wherein said gray scaled patterned light beam incident on the photosensitive material variably photosculpts the photosensitive material to create patterns of continuously variable thickness corresponding to said gray scale patterned light beam.

185. The computer program product of claim 183,

wherein said gray scaled patterned light beam incident on the photosensitive material variably photosculpts the photosensitive material to create patterns of continuously variable composition corresponding to said gray scale patterned light beam.

186. A computer program product recorded on computer readable medium for a maskless photolithography system comprising:

a. computer readable medium for receiving mask pattern information and alignment information corresponding to a desired pattern to be created on the photosensitive material;

b. computer readable medium for generating mask patterns based on received mask pattern information and alignment information;

c. computer readable medium for providing said mask patterns to a patterned light generator;

d. computer readable medium for generating a patterned light beam;

e. computer readable medium for directing said patterned light beam onto a first exposure area of the photosensitive material;

f. computer readable medium for exposing the first exposure area of the photosensitive material to said gray scale patterned light beam, wherein said gray scale patterned light beam is intensity modulated;

g. computer readable medium for providing relative movement of the photosensitive material and the maskless photolithography system to allow exposure of a second exposure area; and

h. computer readable medium for repeating steps a-g to sequentially expose the entire surface of the photosensitive material;

wherein said patterned light beam incident on the photosensitive material photosculpts the photosensitive material to create contiguous patterns by sequential exposure corresponding to said patterned light beam.