Method of operating an advanced process controller by dynamically adapting hierarchy levels

• US 20060195213A1
• Filed: 10/12/2005
• Published: 08/31/2006
• Est. Priority Date: 02/28/2005
• Status: Active Grant

• Current Assignee: Advanced Micro Devices, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Wagner, Heiko, Raebiger, Jan
• Granted Patent: US 7,346,407 B2
• Time in Patent Office: Days
• US Class Current: 700/108
• CPC Class Codes: G05B 19/41845 characterised by system universality, reconfigurability, modularity
• CPC Class Codes: G05B 2219/35391 Sort, order entered data hierarchical
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

By providing a detailed hierarchical structure for an APC algorithm and by dynamically adapting a hierarchical level in this structure, an efficient utilization of controller data is ensured, while at the same time a large number of process conditions may be taken into consideration without requiring a re-design of the hierarchical structure.

Claims

1. A method, comprising:

establishing a hierarchy structure for an APC algorithm designed to provide a parameter setting for at least one process tool of a specified manufacturing environment, said hierarchy structure including a plurality of hierarchy levels, each hierarchy level comprising a plurality of items;

determining a parameter setting for each item in each of the hierarchy levels on the basis of measurement data; and

selecting a currently relevant hierarchy level on the basis of said determined parameter settings to determine a parameter setting of a specified item in said currently relevant hierarchy level for controlling said at least one process tool.

2. The method of claim 1, wherein selecting said currently relevant hierarchy level comprises:

comparing, on a hierarchy level basis, said parameter settings of items of said currently relevant hierarchy level and hierarchy levels below said currently relevant hierarchy level, which are correlated by said hierarchy structure with one item of a hierarchy level below said currently relevant hierarchy level, with each other to obtain a comparison result; and

selecting an updated currently relevant hierarchy level other than said currently relevant hierarchy level as the currently relevant hierarchy level, when said comparison result corresponds to a predefined criterion.

3. The method of claim 2, wherein said updated currently relevant hierarchy level is selected to be one level above said currently relevant hierarchy level when said comparison result for items of the currently relevant hierarchy level indicates a difference that is less than a predefined range.

4. The method of claim 2, wherein, when said comparison result indicates a difference in one specific hierarchy level below said currently relevant hierarchy level, said specific hierarchy level is selected as the updated currently relevant hierarchy level.

5. The method of claim 4, wherein said difference is greater than a predefined threshold.

6. The method of claim 1, further comprising selecting a second currently relevant hierarchy level for at least one specified item in a hierarchy level below said currently relevant hierarchy level, said second currently relevant hierarchy level being relevant for all items in said hierarchy structure that are related to said one specified item and said currently relevant hierarchy level being relevant for the remaining items.

7. The method of claim 1, wherein said plurality of hierarchy levels comprises all relevant hierarchy levels including hierarchy levels that are temporarily relevant.

8. A method, comprising:

establishing an APC algorithm for a specified manufacturing environment including at least one process tool to be controlled on the basis of a parameter setting provided by said APC algorithm on the basis of measurement data, said APC algorithm comprising a hierarchy structure comprising a plurality of items; and

dynamically selecting some of the plurality of items for controlling said at least one process tool on the basis of parameter settings determined for said plurality of items.

9. The method of claim 8, wherein said plurality of items are organized in a plurality of hierarchy levels, each hierarchy level comprising one or more items.

10. The method of claim 9, further comprising:

considering a parameter setting for each item in each of the hierarchy levels; and

selecting a currently relevant hierarchy level on the basis of said considered parameter settings to determine a parameter setting of a specified item in said currently relevant hierarchy level for controlling said at least one process tool.

11. The method of claim 10, wherein selecting said currently relevant hierarchy level comprises:

comparing, on a level basis, said parameter settings of items of said currently relevant hierarchy level and hierarchy levels below said currently relevant hierarchy level, which are correlated by said hierarchy structure with one item of a hierarchy level below said currently relevant hierarchy level, with each other to obtain a comparison result; and

selecting an updated currently relevant hierarchy level other than said currently relevant hierarchy level as the currently relevant hierarchy level when said comparison result corresponds to a predefined criterion.

12. The method of claim 11, wherein said updated currently relevant hierarchy level is selected to be one level above said currently relevant hierarchy level when said comparison result for items of the currently relevant hierarchy level indicates a difference that is less than a predefined range.

13. The method of claim 11, wherein, when said comparison result indicates a difference in one specific hierarchy level below said currently relevant hierarchy level, said specific hierarchy level is selected as the updated currently relevant hierarchy level.

14. The method of claim 10, further comprising selecting a second currently relevant hierarchy level for at least one specified item in a hierarchy level below said currently relevant hierarchy level, said second currently relevant hierarchy level being relevant for all items in said lower hierarchy level that are related to said one specified item and said currently relevant hierarchy level being relevant for the remaining items.

15. The method of claim 10, wherein said plurality of hierarchy levels comprises all relevant hierarchy levels including hierarchy levels that are temporarily relevant.

16. The method of claim 8, further comprising re-arranging said hierarchy structure to establish at least two sub-structures and determining items in said at least two sub-structures on the basis of said parameter settings for further controlling said at least one process tool.