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Method of operating an advanced process controller by dynamically adapting hierarchy levels

  • US 20060195213A1
  • Filed: 10/12/2005
  • Published: 08/31/2006
  • Est. Priority Date: 02/28/2005
  • Status: Active Grant
First Claim
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1. A method, comprising:

  • establishing a hierarchy structure for an APC algorithm designed to provide a parameter setting for at least one process tool of a specified manufacturing environment, said hierarchy structure including a plurality of hierarchy levels, each hierarchy level comprising a plurality of items;

    determining a parameter setting for each item in each of the hierarchy levels on the basis of measurement data; and

    selecting a currently relevant hierarchy level on the basis of said determined parameter settings to determine a parameter setting of a specified item in said currently relevant hierarchy level for controlling said at least one process tool.

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