Method of fabricating wafer-level packaging with sidewall passivation and related apparatus
First Claim
1. An apparatus comprising:
- a frame;
a membrane coupled to the frame and configured to adhere to a surface of a semiconductor wafer, wherein the frame is configured to stretch the membrane in at least one lateral direction while the semiconductor wafer is adhered thereto.
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Abstract
A chip-scale or wafer-level package having passivation layers on substantially all surfaces thereof to form a hermetically sealed package is provided. The package may be formed by disposing a first passivation layer on the passive or backside surface of a semiconductor wafer. The semiconductor wafer may be attached to a flexible membrane and diced, such as by a wafer saw, to separate the semiconductor devices. Once diced, the flexible membrane may be stretched so as to laterally displace the individual semiconductor devices away from one another and substantially expose the side edges thereof. Once the side edges of the semiconductor devices are exposed, a passivation layer may be formed on the side edges and active surfaces of the devices. A portion of the passivation layer over the active surface of each semiconductor device may be removed so as to expose conductive elements formed therebeneath.
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Citations
8 Claims
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1. An apparatus comprising:
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a frame;
a membrane coupled to the frame and configured to adhere to a surface of a semiconductor wafer, wherein the frame is configured to stretch the membrane in at least one lateral direction while the semiconductor wafer is adhered thereto. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification