Fine control of rotation and translation of discretely controlled micromirror

• US 20060198012A1
• Filed: 03/04/2005
• Published: 09/07/2006
• Est. Priority Date: 03/04/2005
• Status: Active Grant

• Current Assignee: Stereo Display, Inc.
• Original Assignee: Angstrom, Inc., Stereo Display, Inc.
• Inventors: Seo, Cheong Soo, Cho, Gyoung Il, Noh, Jae Huek
• Granted Patent: US 7,330,297 B2
• Time in Patent Office: Days
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A micromirror control system includes a bottom layer configured to support the micromirror control system including a stopper plate coupled to the bottom layer at a first end, configured to rotate about an axis. The micromirror control system also includes a micromirror, communicatively coupled to the stopper plate on a bottom side, and including a reflective top side configured to reflect light. Rotation of the stopper plate about the axis into contact with the micromirror is configured to adjust an orientation of the micromirror. In one aspect, the micromirror control system also includes an actuating device, communicatively coupled to the stopper plate, configured to control the rotation of the stopper plate about the axis. The advantages of the present invention include the ability to finely control translation and rotation of a discretely controlled micromirror.

Claims

1. A micromirror control system, comprising:

a bottom layer configured to support the micromirror control system;

at least one stopper plate configured to rotate about an axis; and

a micromirror having a top side and a bottom side, communicatively coupled to the stopper plate on the bottom side, and including a reflective surface on the top side configured to reflect light;

wherein rotation of the stopper plate about the axis into contact with the micromirror is configured to adjust an orientation of the micromirror.

2. The micromirror control system of claim 1, further comprising an actuating device, communicatively coupled to the stopper plate, configured to control the rotation of the stopper plate about the axis.

3. The micromirror control system of claim 2, wherein the actuating device includes an electrode, configured to control the rotation of the stopper plate by electrostatic force.

4. The micromirror control system of claim 3, wherein the actuating device includes a micromirror electrode, configured to pull the micromirror down to rest the micromirror on the stopper plate.

5. The micromirror control system of claim 2, wherein the actuating device includes a comb-drive, configured to control the rotation of the stopper plate by mechanical force.

6. The micromirror control system of claim 1, wherein the stopper plate comprises a top side, a bottom side and a support member, the support member having a first end and a second end, the first end coupled to the micromirror control system bottom layer, and the second end coupled to the stopper plate bottom side.

7. The micromirror control system of claim 1, further comprising a plurality of micromirror post attached to the micromirror bottom side, the micromirror post communicatively contacting the stopper plate to adjust the orientation of the micromirror.

8. The micromirror control system of claim 1, further comprising a plurality of micromirror post attached to the stopper plate top side, the micromirror post communicatively contacting the micromirror bottom side to adjust the orientation of the micromirror.

9. A micromirror control system, comprising:

a bottom layer configured to support the micromirror control system;

at least one support member having a first end and a second end, the first end coupled to the bottom layer;

at least one stopper plate rotatably coupled to the support member second end providing a rotational axis about the support member second end;

a plurality of micromirror post communicatively coupled to a micromirror and communicatively coupled the stopper plate; and

an actuating device communicatively coupled to the stopper plate to control the rotation of the stopper plate;

wherein, the stopper plate rotates about the axis into contact with the micromirror to adjust an orientation of the micromirror.

10. The micromirror control system of claim 9, wherein the actuating device comprises an electrode configured to control the rotation of the stopper plate by electrostatic force.

11. The micromirror control system of claim 9, wherein the actuating device includes a micromirror electrode, configured to pull the micromirror down to rest the micromirror on the stopper plate.

12. The micromirror control system of claim 9, wherein the actuating device comprises a comb-drive, configured to control the rotation of the stopper plate by mechanical force.

13. The micromirror control system of claim 9, wherein the micromirror comprises a bottom side and a top side, the top side having a reflective surface configured to reflect light.

14. The micromirror control system of claim 13, wherein the stopper plate comprises a top side and a bottom side, the micromirror post attached to the stopper plate top side, the micromirror post communicatively contacting the micromirror bottom side to adjust the orientation of the micromirror.

15. The micromirror control system of claim 13, wherein the stopper plate comprises a top side and a bottom side, the micromirror post attached to the micromirror bottom side, the micromirror post communicatively contacting the stopper plate top side to adjust the orientation of the micromirror.

16. The micromirror control system of claim 14, wherein the stopper plate further comprises a stopper plate post attached at the stopper plate bottom side to adjust the orientation of the micromirror.

17. The micromirror control system of claim 15, wherein the stopper plate further comprises a stopper plate post attached at the micromirror control system bottom layer to adjust the orientation of the micromirror.

18. A method for controlling rotation and translation movement of a discretely controlled micromirror control system including a micromirror, at least one stopper plate, and a bottom layer configured to support the micromirror control system, comprising:

rotating the at least one stopper plate to adjust an orientation of the micromirror;

resting the micromirror on the rotated stopper; and

reflecting light from the micromirror according to the adjusted orientation.

19. The method of claim 18, wherein an actuating device communicatively coupled to the stopper plate is configured to control rotation of the stopper plate.

20. The method of claim 18, wherein the micromirror control system further comprises a plurality of micromirror post attached to a micromirror bottom side, the micromirror post communicatively contacting the stopper plate to adjust the orientation of the micromirror.

21. The method of claim 18, wherein the micromirror control system further comprises a micromirror post attached to a stopper plate top side, the micromirror post communicatively contacting a micromirror bottom side to adjust the orientation of the micromirror.

22. The method of claim 19, wherein the actuating device is an electrode configured to control the rotation of the stopper plate by electrostatic force.

23. The method of claim 19, wherein the actuating device is a comb-drive, configured to control the rotation of the stopper plate by mechanical force.