Surface manipulation and selective deposition processes using adsorbed halogen atoms
First Claim
1. A process for manipulating surface termination on a substrate having a hydrogen atom terminated portion, comprising:
- a first step of exposing a surface of said substrate to a halogen gas while the surface is also being irradiated by ultraviolet light to form a halogen surface layer on said hydrogen atom terminated substrate portion; and
a second step of exposing said halogen surface layer to a gas containing a compound of the formula R-OH, wherein R is lower alkyl to form a passivation layer;
wherein said first step and second step are done at temperatures below about 200°
C. and in an inert atmosphere.
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Abstract
The present invention provides a surface preparation process using adsorbed halogen. The halogen is applied in a gas phase with UV light. The adsorbed halogen is subsequently modified in another gas phase reaction. The halogen may be reacted with water to form a hydroxyl-bearing Si—O monolayer that forms a layer for subsequent metal deposition. In one aspect the halogen layer is reacted with an alkyl or alkoxy of the formula R-OH to form a passivation layer. By replacing hydrogen atom termination with alkoxy (e.g.methoxy termination, —OCH3). The selective deposition process can be used for passivating and depositing thin metal films on material surfaces composed of any combination of the group consisting of semiconductors, conductors, insulators, and the like.
100 Citations
20 Claims
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1. A process for manipulating surface termination on a substrate having a hydrogen atom terminated portion, comprising:
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a first step of exposing a surface of said substrate to a halogen gas while the surface is also being irradiated by ultraviolet light to form a halogen surface layer on said hydrogen atom terminated substrate portion; and
a second step of exposing said halogen surface layer to a gas containing a compound of the formula R-OH, wherein R is lower alkyl to form a passivation layer;
wherein said first step and second step are done at temperatures below about 200°
C. and in an inert atmosphere. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A process for manipulating surface termination on a substrate having a hydrogen atom terminated portion, comprising:
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a first step of exposing a surface of said substrate to a halogen gas while the surface is also being irradiated by ultraviolet light to form a halogen surface layer on the hydrogen atom terminated portion;
a second step of exposing said halogen surface layer to an aqueous gas to form hydroxyl groups, on the surface of the substrate; and
a third step comprising exposure to a metal halide, whereby metal is deposited only on portions of the surface of the substrate bearing hydroxyl groups, wherein the first step and second step are done in an inert atmosphere at a temperature below about 75°
C. and the third step is done at a temperature below about 200°
C. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification