Anisotropic conductive connector and circuit-device electrical inspection device

• US 20060199405A1
• Filed: 04/05/2004
• Published: 09/07/2006
• Est. Priority Date: 04/16/2003
• Status: Active Grant

• Current Assignee: ISC Incorporated (Svenska Cellulosa AB SCA)
• Original Assignee: JSR Corporation
• Inventors: Sato, Katsumi, Inoue, Kazuo
• Granted Patent: US 7,255,579 B2
• Time in Patent Office: Days
• US Class Current: 439/91
• CPC Class Codes: G01R 1/0735 arranged on a flexible frame or film
• CPC Class Codes: H01L 23/49827 Via connections through the substrates, e.g. pins going through the substrate, coaxial cables H01L23/49822, H01L23/49833, H01L23/4985, H01L23/49861 take precedence
• CPC Class Codes: H01L 23/49838 Geometry or layout
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01R 13/2414 conductive elastomers

Abstract

An anisotropically conductive connector, by which expected electrical inspection can be conducted even to a circuit device having a clock frequency of, for example, at least 1 GHz, and an electrical inspection apparatus for circuit devices, which is equipped with this connector. The anisotropically conductive connector includes an elastic anisotropically conductive film having a plurality of conductive parts for connection arranged in accordance with a pattern corresponding to electrodes to be connected and extending in a thickness-wise direction of the film and an insulating part mutually insulating these conductive parts for connection, wherein conductive parts for high-frequency shielding extending in the thickness-wise direction are formed in the elastic anisotropically conductive film. The electrical inspection apparatus for circuit devices includes the above anisotropically conductive connector.

Claims

1. An anisotropically conductive connector comprising an elastic anisotropically conductive film having a plurality of conductive parts for connection arranged in accordance with a pattern corresponding to electrodes to be connected and extending in a thickness-wise direction of the film and an insulating part mutually insulating these conductive parts for connection,

wherein a conductive part for high-frequency shielding extending in the thickness-wise direction is formed in the elastic anisotropically conductive film.

7. The anisotropically conductive connector according to any one of claim 1, 2 or 4, which comprises cylindrical conductive part for high-frequency shielding, wherein the cylindrical conductive part for high-frequency shielding is arranged by being located concentrically with one conductive part for connection so as to surround the respective conductive parts for connection.

8. The anisotropically conductive connector according to any one of claim 1, 2, 4, or 7 which comprises a plurality of conductive parts for high-frequency shielding for surrounding the same conductive part for connection.

9. The anisotropically conductive connector according to claim 8, wherein a clearance distance between conductive parts for high-frequency shielding adjoining each other, which surround the same conductive part for connection, is at most 1/10 of a wavelength of a measurement signal.

11. The anisotropically conductive connector according to any one of claim 1, 3, 5, 6 or 10, which comprises a cylindrical conductive part for high-frequency shielding, wherein the cylindrical conductive part for high-frequency shielding is arranged so as to surround the group of conductive parts including the plurality of the conductive parts for connection.

12. The anisotropically conductive connector according to any one of claim 1, 3, 5, 6, 10 or 11, which comprises a plurality of conductive parts for high-frequency shielding surrounding the group of conductive parts including the plurality of the conductive parts for connection.

13. The anisotropically conductive connector according to claim 12, wherein a clearance distance between conductive parts for high-frequency shielding adjoining each other, which surround the group of conductive parts, is at most 1/10 of a wavelength of a measurement signal.

14. The anisotropically conductive connector according to any one of claims 1 to 3, wherein the conductive parts for high-frequency shielding are connected to a ground.

16. An electrical inspection apparatus for circuit devices, which comprises the anisotropically conductive connector according to any one of claims 1 to 15.

17. An electrical inspection apparatus for circuit devices, which comprises a circuit board for inspection, on which inspection electrodes have been formed in accordance with a pattern corresponding to electrodes to be inspected of a circuit device, which is an object of inspection, and the anisotropically conductive connector according to claim 14, which is arranged on the circuit board for inspection,

wherein in the circuit board for inspection, grounding electrodes connected to a ground are formed in accordance with a pattern corresponding to the conductive parts for high-frequency shielding in the anisotropically conductive connector.

2. An anisotropically conductive connector comprising an elastic anisotropically conductive film having a plurality of conductive parts for connection arranged in accordance with a pattern corresponding to electrodes to be connected and extending in a thickness-wise direction of the film and an insulating part mutually insulating these conductive parts for connection,

wherein conductive parts for high-frequency shielding arranged so as to surround the each of conductive parts for connection and extending in the thickness-wise direction are formed in the elastic anisotropically conductive film.

3. An anisotropically conductive connector comprising an elastic anisotropically conductive film having a plurality of conductive parts for connection arranged in accordance with a pattern corresponding to electrodes to be connected and extending in a thickness-wise direction of the film and an insulating part mutually insulating these conductive parts for connection,

wherein a conductive part for high-frequency shielding arranged so as to surround a group of conductive parts including the plurality of the conductive parts for connection and extending in the thickness-wise direction is formed in the elastic anisotropically conductive film.

4. An anisotropically conductive connector comprising:

a frame plate having conductivity, in which a plurality of openings have been formed in accordance with a pattern corresponding to electrodes to be connected, and

an elastic anisotropically conductive film composed of a plurality of functional parts arranged in the respective openings of the frame plate and composed of a conductive part for connection extending in a thickness-wise direction of the film and an insulating part formed integrally with the periphery of the conductive part, and a part to be supported, which is formed integrally with the peripheries of the functional parts and fixed to the frame plate by being laminated on the frame plate,

wherein conductive parts for high-frequency shielding arranged so as to surround the each of conductive parts for connection, electrically connected to the frame plate and extending in the thickness-wise direction are formed in the part to be supported in the elastic anisotropically conductive film.

15. The anisotropically conductive connector according to any one of claims 4 to 6, wherein the frame plate is connected to a ground.

18. An electrical inspection apparatus for circuit devices, which comprises a circuit board for inspection, on which inspection electrodes have been formed in accordance with a pattern corresponding to electrodes to be inspected of a circuit device, which is an object of inspection, and the anisotropically conductive connector according to claim 15, which is arranged on the circuit board for inspection,

wherein the frame plate in the anisotropically conductive connector is connected to a ground.

5. An anisotropically conductive connector comprising:

a frame plate having conductivity, in which an opening extending through in a thickness-wise direction has been formed, and

an elastic anisotropically conductive film arranged in the opening of the frame plate and composed of a functional part having a plurality of conductive parts for connection arranged in accordance with a pattern corresponding to electrodes to be connected and extending in the thickness-wise direction and an insulating part mutually insulating the conductive parts for connection, and a part to be supported, which is formed integrally with the periphery of the functional part and fixed to the frame plate by being laminated on the frame plate,

wherein a conductive part for high-frequency shielding arranged so as to surround a group of conductive parts including the plurality of the conductive parts for connection, electrically connected to the frame plate and extending in the thickness-wise direction is formed in the part to be supported in the elastic anisotropically conductive film.

10. The anisotropically conductive connector according to claim 5, wherein one or more conductive parts for non-connection are formed in addition to the conductive parts for connection in the elastic anisotropically conductive film, and the conductive parts for high-frequency shielding are arranged so as to surround a group of conductive parts including the plurality of the conductive parts for connection and one or more conductive parts for non-connection.

6. An anisotropically conductive connector comprising:

a frame plate having conductivity, in which a plurality of openings have been formed in accordance with a pattern corresponding to electrodes to be connected, and

an elastic anisotropically conductive film composed of a plurality of functional parts arranged in the respective openings of the frame plate and composed of a conductive part for connection extending in a thickness-wise direction of the film and an insulating part formed integrally with the periphery of the conductive part, and a part to be supported, which is formed integrally with the peripheries of the functional parts and fixed to the frame plate by being laminated on the frame plate,

wherein a conductive part for high-frequency shielding arranged so as to surround a group of conductive parts including the plurality of the conductive parts for connection, electrically connected to the frame plate and extending in the thickness-wise direction is formed in the part to be supported in the elastic anisotropically conductive film.