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Apparatus and method for forming vias

  • US 20060199476A1
  • Filed: 03/03/2005
  • Published: 09/07/2006
  • Est. Priority Date: 03/03/2005
  • Status: Active Grant
First Claim
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1. An apparatus for forming vias in one or more layers, comprising:

  • a) one or more beams located in alignment with said layers for forming one or more vias in one or more areas of the layers; and

    b) a vacuum mechanism for collecting ablated material caused by said directed beams forming said one or more vias, said vacuum mechanism being in fixed alignment with respect to said one or more beams such that said vacuum applies a removal force on said ablated material at the time and location when said one or more vias is being formed.

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