METHODS FOR REMOVING EXTRANEOUS AMOUNTS OF MOLDING MATERIAL FROM A SUBSTRATE
First Claim
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1. A method for removing amounts of a molding material having a particulate component and a non-particulate component from an area on a substrate, the method comprising:
- exposing the substrate to a plasma effective to remove the non-particulate component of the molding material from the area; and
exposing the substrate to a non-plasma process effective to remove the particulate component of the molding material from the area.
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Abstract
Methods for removing thin layers of extraneous multi-component molding material from one or more areas on a substrate. The methods include exposing the substrate to a plasma effective to remove a non-particulate component of the molding material from each area. The methods further include exposing the substrate to a non-plasma process effective to remove a particulate component of the molding material from the area.
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Citations
17 Claims
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1. A method for removing amounts of a molding material having a particulate component and a non-particulate component from an area on a substrate, the method comprising:
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exposing the substrate to a plasma effective to remove the non-particulate component of the molding material from the area; and
exposing the substrate to a non-plasma process effective to remove the particulate component of the molding material from the area. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification