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Alumina-sintered body and associated manufacturing method, and electrostatic chuck and associated manufacturing method

  • US 20060205585A1
  • Filed: 03/08/2006
  • Published: 09/14/2006
  • Est. Priority Date: 03/11/2005
  • Status: Active Grant
First Claim
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1. An alumina-sintered body obtained by mixing a binder to alumina powder with a purity of 99.5% or more to prepare granulated powder, forming a compact of the granulated powder with a metallic die, and performing a hot-press sintering of the compact, whereby the alumina-sintered body contains 0.05% to 0.5% by weight residual carbon, and has a four-point bending strength of 500 MPa or more.

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