MEMS flow module with piston-type pressure regulating structure
First Claim
1. A MEMS flow module, comprising:
- a first plate comprising a first flow port;
a second plate comprising a second flow port;
a regulator disposable within said second flow port, wherein said regulator fluidly communicates with said first flow port, wherein said second plate and said regulator are disposed in a substantially common plane in the absence of at least a certain differential pressure across said MEMS flow module, and wherein said regulator is moveable relative to each of said first and second plates to change a magnitude of a spacing of said regulator from said first plate in response to at least a certain change in a differential pressure across said MEMS flow module.
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Accused Products
Abstract
Various embodiments of MEMS flow modules that regulate flow or pressure by the axial movement of a flow regulating or controlling structure are disclosed. One such MEMS flow module (40) has a regulator (66) that is aligned with and spaced from a first flow port (52) through a first plate (50). The regulator (66) is structurally interconnected with a flexible third plate (80). When the regulator (66) experiences at least a certain differential pressure, the regulator (66) moves at least generally axially away from the first plate (50) by a flexing of the third plate (80) at least generally away from the first plate (50). Increasing the spacing between the regulator (66) and the first plate (50) accommodates an increased flow or flow rate through the MEMS flow module (40).
108 Citations
60 Claims
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1. A MEMS flow module, comprising:
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a first plate comprising a first flow port;
a second plate comprising a second flow port;
a regulator disposable within said second flow port, wherein said regulator fluidly communicates with said first flow port, wherein said second plate and said regulator are disposed in a substantially common plane in the absence of at least a certain differential pressure across said MEMS flow module, and wherein said regulator is moveable relative to each of said first and second plates to change a magnitude of a spacing of said regulator from said first plate in response to at least a certain change in a differential pressure across said MEMS flow module. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A MEMS flow module, comprising:
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a first fabrication level comprising a first plate, wherein said first plate comprises a first flow port;
a second fabrication level comprising a second plate, a second flow port associated with said second plate, and a regulator, wherein said regulator fluidly communicates with said first flow port, and wherein said regulator is moveable relative to said first and second plates to change a magnitude of a spacing of said regulator from said first plate in response to at least a certain change in a differential pressure across said MEMS flow module. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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38. A MEMS flow module, comprising:
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a first plate comprising a first flow port;
a second plate comprising a second flow port; and
a regulator to fluidly communicates with said first flow port, wherein an outside perimeter of said regulator and a sidewall of said second plate that defines said second flow port are separated by an annular gap when said regulator is disposed within said second flow port, and wherein said regulator is moveable relative to said first and second plates to change a magnitude of a spacing of said regulator from said first plate in response to at least a certain change in a differential pressure across said MEMS flow module. - View Dependent Claims (39, 40, 41, 42, 43, 44, 45, 46, 47, 48)
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49. A MEMS flow module, comprising:
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a first plate comprising a first flow port;
a second plate comprising a second flow port;
a regulator that fluidly communicates with said first flow port; and
a third plate comprising a third flow port, wherein said regulator is located between said first plate and said third plate, and wherein at least a portion of said third plate compliantly supports said regulator to allow said regulator to move at least generally axially away from said first plate in response to at least a certain change in a differential pressure across said MEMS flow module to accommodate an increased flow through said MEMS flow module in a direction that proceeds through said first port, then through said second flow port, and then through said third flow port. - View Dependent Claims (50, 51)
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52. A MEMS flow module, comprising:
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a plate comprising a flow port;
a regulator disposable within said flow port, wherein said regulator is moveable relative to said plate in response to at least a certain change in a differential pressure across said MEMS flow module. - View Dependent Claims (53, 54, 55, 56, 57, 58, 59, 60)
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Specification