Substrate processing system managing apparatus information of substrate processing apparatus
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Accused Products
Abstract
A substrate processing system comprises a substrate processing apparatus, an information storage server and a support computer, which are connected to a network respectively. When the substrate processing apparatus causes a failure, an alarm processing part extracts a necessary relevant log file and stores the same in a hard disk of the information storage server. A failure information generation part generates failure information, which in turn is finally stored in the hard disk of the information storage servers as a failure information database. An apparatus information uncasing part renders the relevant log file and the failure information database readable from the support computer located in a remote place. Thus, the relevant log file and the failure information database can be immediately read. In other words, provided is a substrate processing system rendering operation information immediately readable from a remote place when the substrate processing apparatus causes a failure.
20 Citations
43 Claims
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1-23. -23. (canceled)
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24. A substrate processing system comprising:
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a substrate processing apparatus comprising a processing unit performing prescribed processing on a substrate, a system control part controlling overall said apparatus and a unit control part individually controlling said processing unit;
a computer connected with said substrate processing apparatus through a network; and
a matching property confirmation element confirming the matching properties of software modules presently installed in said system control part and said unit control part respectively when a software module is installed in said system control part or said unit control part. - View Dependent Claims (25, 26, 27, 28)
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29. A substrate processing system comprising:
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a substrate processing apparatus comprising a processing unit performing prescribed processing on a substrate, a system control part controlling overall said apparatus and a unit control part individually controlling said processing unit;
a computer connected with said substrate processing apparatus through a network; and
an information storage server comprising a version information storage element storing version information of software modules installed in said system control part and said unit control part and a version information uncasing element rendering said version information stored in said version information storage element readable from said computer through said network. - View Dependent Claims (30, 31, 32, 33, 34)
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35. A substrate processing apparatus management method managing a substrate processing apparatus comprising a processing unit performing prescribed processing on a substrate, a system control part controlling overall said apparatus and a unit control part individually controlling said processing unit, comprising a step of:
confirming the matching properties of software modules presently installed in said system control part and said unit control part respectively when a software module is installed in said system control part or said unit control part. - View Dependent Claims (36)
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37. A substrate processing apparatus comprising:
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a processing unit performing prescribed processing on a substrate;
a system control part controlling the overall apparatus;
a unit control part individually controlling said processing unit; and
a matching property confirmation element confirming the matching properties of software modules presently installed in said system control part and said unit control part respectively when a software module is installed in said system control part or said unit control part. - View Dependent Claims (38, 39, 40)
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41. A substrate processing apparatus comprising:
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a processing unit performing prescribed processing on a substrate;
a system control part controlling overall said apparatus; and
a unit control part individually controlling said processing unit, wherein said system control part transmits version information of software modules presently installed in said system control part and said unit control part respectively when a software module is installed in said system control part or said unit control part.
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42. A program for a computer included in a substrate processing apparatus, said substrate processing apparatus comprising a processing unit performing prescribed processing on a substrate, a system control part controlling the overall apparatus and a unit control part individually controlling said processing unit, wherein
execution of said program by said computer enables said substrate processing to confirm the matching properties of software modules presently installed in said system control part and said unit control part respectively when a software module is installed in said system control part or said unit control part.
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43. A computer-readable recording medium on which a program for a computer included in a substrate processing apparatus is recorded, said substrate processing apparatus comprising a processing unit performing prescribed processing on a substrate, a system control part controlling the overall apparatus and a unit control part individually controlling said processing unit, wherein
execution of said program by said computer enables said substrate processing to confirm the matching properties of software modules presently installed in said system control part and said unit control part respectively when a software module is installed in said system control part or said unit control part.
Specification