Linear accelerometer
First Claim
1. A linear accelerometer comprising:
- a support substrate;
a first fixed electrode comprising one or more first fixed capacitive plates fixed to the support structure and having a first height;
a second fixed electrode comprising one or more second fixed capacitive plates fixed to the support structure and having a second height;
a movable inertial mass comprising one or more first movable capacitive plates capacitively coupled to the one or more first fixed capacitive plates and one or more second movable capacitive plates capacitively coupled to the one or more second fixed capacitive plates, wherein the one or more first movable capacitive plates have a third height greater than the first height of the one or more first fixed capacitive plates, and the one or more second movable capacitive plates have a fourth height less than the second height of the one or more second fixed capacitive plates;
a support structure for supporting the movable inertial mass and allowing linear movement of the inertial mass relative to the support substrate upon experiencing a linear acceleration along a sensing axis;
an input for providing input signals to one of the first and second fixed and first and second movable capacitive plates; and
an output for receiving an output signal from the other of the first and second fixed and first and second movable capacitive plates which varies as a function of capacitive coupling and is indicative of magnitude and direction of acceleration along the sensing axis.
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Accused Products
Abstract
A linear accelerometer is provided having a support substrate, fixed electrodes having fixed capacitive plates, and a movable inertial mass having movable capacitive plates capacitively coupled to the fixed capacitive plates. Adjacent capacitive plates vary in height. The accelerometer further includes support tethers for supporting the inertial mass and allowing movement of the inertial mass upon experiencing a linear acceleration along a sensing axis. The accelerometer has inputs and an output for providing an output signal which varies as a function of the capacitive coupling and is indicative of both magnitude and direction of vertical acceleration along the sensing Z-axis. A microsensor fabrication process is also provided which employs a top side mask and etch module.
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Citations
19 Claims
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1. A linear accelerometer comprising:
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a support substrate;
a first fixed electrode comprising one or more first fixed capacitive plates fixed to the support structure and having a first height;
a second fixed electrode comprising one or more second fixed capacitive plates fixed to the support structure and having a second height;
a movable inertial mass comprising one or more first movable capacitive plates capacitively coupled to the one or more first fixed capacitive plates and one or more second movable capacitive plates capacitively coupled to the one or more second fixed capacitive plates, wherein the one or more first movable capacitive plates have a third height greater than the first height of the one or more first fixed capacitive plates, and the one or more second movable capacitive plates have a fourth height less than the second height of the one or more second fixed capacitive plates;
a support structure for supporting the movable inertial mass and allowing linear movement of the inertial mass relative to the support substrate upon experiencing a linear acceleration along a sensing axis;
an input for providing input signals to one of the first and second fixed and first and second movable capacitive plates; and
an output for receiving an output signal from the other of the first and second fixed and first and second movable capacitive plates which varies as a function of capacitive coupling and is indicative of magnitude and direction of acceleration along the sensing axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A linear accelerometer comprising:
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a support substrate;
a first bank of variable capacitors formed of one or more first fixed capacitive plates and one or more first movable capacitive plates, wherein the first fixed capacitive plates have a height greater than a height of the first movable capacitive plates;
a second bank of variable capacitors formed of one or more second fixed capacitive plates and one or more second movable capacitive plates, wherein the second movable capacitor plates have a height greater than a height of the second fixed capacitive plates;
an inertial mass that is linearly movable in response to linear acceleration along a sensing axis, wherein the inertial mass includes the first and second movable capacitive plates;
a support structure for supporting the inertia mass and allowing linear movement of the inertial mass upon experiencing a linear acceleration along the sensing axis;
a first input for supplying an input signal to the first bank of variable capacitors;
a second input for supplying an input signal to the second bank of variable capacitors; and
an output for sensing an output signal from the first and second variable capacitors indicative of magnitude and direction of linear acceleration sensed along the sensing axis in response to linear movement of the inertial mass. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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Specification