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Linear accelerometer

  • US 20060207327A1
  • Filed: 03/16/2005
  • Published: 09/21/2006
  • Est. Priority Date: 03/16/2005
  • Status: Abandoned Application
First Claim
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1. A linear accelerometer comprising:

  • a support substrate;

    a first fixed electrode comprising one or more first fixed capacitive plates fixed to the support structure and having a first height;

    a second fixed electrode comprising one or more second fixed capacitive plates fixed to the support structure and having a second height;

    a movable inertial mass comprising one or more first movable capacitive plates capacitively coupled to the one or more first fixed capacitive plates and one or more second movable capacitive plates capacitively coupled to the one or more second fixed capacitive plates, wherein the one or more first movable capacitive plates have a third height greater than the first height of the one or more first fixed capacitive plates, and the one or more second movable capacitive plates have a fourth height less than the second height of the one or more second fixed capacitive plates;

    a support structure for supporting the movable inertial mass and allowing linear movement of the inertial mass relative to the support substrate upon experiencing a linear acceleration along a sensing axis;

    an input for providing input signals to one of the first and second fixed and first and second movable capacitive plates; and

    an output for receiving an output signal from the other of the first and second fixed and first and second movable capacitive plates which varies as a function of capacitive coupling and is indicative of magnitude and direction of acceleration along the sensing axis.

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