Multiple-axis linear accelerometer
First Claim
1. A multiple-axis linear accelerometer for sensing acceleration in multiple-axes comprising:
- a support substrate;
a first fixed electrode comprising one or more first fixed capacitive plates fixed to the support substrate;
a second fixed electrode comprising one or more second fixed capacitive plates fixed to the support structure;
a movable inertial mass comprising one or more first movable capacitive plates capacitively coupled to the one or more first fixed capacitive plates and one or more second movable capacitive plates capacitively coupled to the one or more second fixed capacitive plates, wherein the first fixed capacitive plates and the first movable capacitive plates form a variable capacitor for sensing linear acceleration along a first sensing axis, and wherein the second fixed capacitive plates and second movable capacitive plates have a height variance and form a variable capacitor for sensing linear acceleration along a second sensing axis;
a support structure for supporting the movable inertial mass and allowing linear movement of the inertial mass along multiple sensing axes relative to the support substrate upon experiencing linear acceleration along any of the multiple sensing axes;
an input for providing input signals to one of the fixed and movable capacitive plates; and
an output for receiving an output signal from the other of the fixed and movable capacitive plates which varies as a function of the capacitive coupling and is indicative of linear acceleration sensed in the multiple sensing axes.
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Accused Products
Abstract
A three-axis accelerometer is provided for sensing acceleration in three orthogonal axes. The accelerometer includes a support substrate, fixed electrodes having fixed capacitive plates fixed to the support substrate, and a movable inertial mass having movable capacitive plates capacitively coupled to the fixed capacitive plates. The accelerometer includes banks of fixed and movable capacitive plates oriented to sense acceleration in orthogonal X- and Y-axes. Additionally, the accelerometer includes fixed and movable capacitive plates having a height variation between adjacent plates to sense acceleration in the vertical Z-axis. Input signals are applied to certain electrodes coupled to the fixed capacitive plates, and an output signal is generated on the inertial mass, which is indicative of acceleration in each of the sensing axes. The output signal may be further processed to generate individual acceleration outputs for each of the sensing axes.
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Citations
27 Claims
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1. A multiple-axis linear accelerometer for sensing acceleration in multiple-axes comprising:
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a support substrate;
a first fixed electrode comprising one or more first fixed capacitive plates fixed to the support substrate;
a second fixed electrode comprising one or more second fixed capacitive plates fixed to the support structure;
a movable inertial mass comprising one or more first movable capacitive plates capacitively coupled to the one or more first fixed capacitive plates and one or more second movable capacitive plates capacitively coupled to the one or more second fixed capacitive plates, wherein the first fixed capacitive plates and the first movable capacitive plates form a variable capacitor for sensing linear acceleration along a first sensing axis, and wherein the second fixed capacitive plates and second movable capacitive plates have a height variance and form a variable capacitor for sensing linear acceleration along a second sensing axis;
a support structure for supporting the movable inertial mass and allowing linear movement of the inertial mass along multiple sensing axes relative to the support substrate upon experiencing linear acceleration along any of the multiple sensing axes;
an input for providing input signals to one of the fixed and movable capacitive plates; and
an output for receiving an output signal from the other of the fixed and movable capacitive plates which varies as a function of the capacitive coupling and is indicative of linear acceleration sensed in the multiple sensing axes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A multiple-axis linear accelerometer for sensing acceleration in multiple-axes comprising:
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a support substrate;
a first fixed electrode comprising one or more first fixed capacitive plates fixed to the support substrate;
a second fixed electrode comprising one or more second fixed capacitive plates fixed to the support structure;
a third fixed electrode comprising one or more third fixed capacitive plates fixed to the substrate;
a movable inertial mass comprising one or more first movable capacitive plates capacitively coupled to the one or more first fixed capacitive plates, and one or more second movable capacitive plates capacitively coupled to the one or more second fixed capacitive plates, and one or more third movable capacitive plates capacitively coupled to the one or more third fixed capacitive plates, wherein the first fixed capacitive plates and the first movable capacitive plates form a variable capacitor for sensing linear acceleration along a first sensing axis, and wherein the second fixed capacitive plates and second movable capacitive plates have a height variance and form a variable capacitor for sensing linear acceleration along a second sensing axis, and further wherein the third fixed capacitive plates and third movable capacitive plates form a variable capacitor for sensing linear acceleration along a third sensing axis;
a support structure for supporting the movable inertial mass and allowing linear movement of the inertial mass along multiple sensing axes relative to the support substrate upon experiencing linear acceleration along any of the multiple sensing axes;
an input for providing input signals to one of the fixed and movable capacitive plates; and
an output for receiving an output signal from the other of the fixed and movable capacitive plates which varies as a function of the capacitive coupling and is indicative of linear acceleration sensed in the multiple sensing axes. - View Dependent Claims (12, 13, 14, 15)
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16. A linear accelerometer for sensing acceleration in multiple sensing axes comprising:
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a support substrate;
a first bank of variable capacitors formed of one or more first fixed capacitive plates and one or more first movable capacitive plates for sensing acceleration along a first sensing axis, wherein the first fixed capacitive plates have a height different than a height of the first movable capacitive plates;
a second bank of variable capacitors formed of one or more second fixed capacitive plates and one or more second movable capacitive plates for sensing acceleration along a second sensing axis;
an inertial mass that is linearly movable in response to linear acceleration along any of multiple sensing axes, wherein the inertial mass includes the first and second movable capacitive plates;
a support structure for supporting the inertial mass and allowing movement of the inertial mass upon experiencing linear acceleration along any of the multiple sensing axes;
a first input for supplying an input signal to the first bank of variable capacitors;
a second input for supplying an input signal to the second bank of variable capacitors; and
an output for sensing an output signal from the first and second variable capacitors indicative of linear acceleration sensed along the multiple sensing axes in response to movement of the inertial mass. - View Dependent Claims (17, 18, 19, 20, 21, 22)
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23. A linear accelerometer for sensing acceleration in multiple sensing axes comprising:
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a support substrate;
a first bank of variable capacitors formed of one or more first fixed capacitive plates and one or more first movable capacitive plates for sensing acceleration along a first sensing axis, wherein the first fixed capacitive plates have a height different than a height of the first movable capacitive plates;
a second bank of variable capacitors formed of one or more second fixed capacitive plates and one or more second movable capacitive plates for sensing acceleration along a second sensing axis;
a third bank of variable capacitors formed of one or more third fixed capacitive plates and one or more third movable capacitive plates for sensing linear acceleration along a third sensing axes;
an inertial mass that is linearly movable in response to linear acceleration along any of the first, second and third sensing axes, wherein the inertial mass includes the first, second and third movable capacitive plates;
a support structure for supporting the inertial mass and allowing movement of the inertial mass upon experiencing linear acceleration along any of the first, second and third sensing axes;
a first input for supplying an input signal to the first bank of variable capacitors;
a second input for supplying an input signal to the second bank of variable capacitors;
a third input for supplying an input signal to the third bank of variable capacitors; and
an output for sensing an output signal from the first, second and third variable capacitors indicative of linear acceleration sensed along the first, second and third sensing axes in response to movement of the inertial mass. - View Dependent Claims (24, 25, 26, 27)
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Specification