INTERNAL PRESSURE CONTROLLER OF CHAMBER AND INTERNAL PRESSURE SUBJECT -TO- CONTROL TYPE CHAMBER
First Claim
1. An internal pressure controller of a chamber, comprising:
- (a) a supply gas input part;
(b) a supply gas output part connected to receive supply gas from the supply gas input part;
(c) a gas flow rate control part operably connected between the gas input part and gas output part;
(d) a chamber connected to receive supply gas from the supply gas output part; and
(e) a means to transmit pressure data of the chamber to the gas flow rate control part, and the gas flow rate control part includes i. a plurality of pressure type flow rate controllers connected in parallel; and
ii. a first controller operable to control the operation of the plurality of pressure type flow controllers, wherein each pressure type flow controller comprises an orifice, a pressure detector on an upstream side of the orifice, a control valve provided on the upstream side of the pressure detector, and a computation control part that outputs a difference Qy with a set flow rate Qs as a driving signal to the control valve by computing a gas flow rate Qc passing through the orifice with pressure P1 detected by the pressure detector using formula Qc=KP1, where K is a constant, thus operating a respective one of the pressure type flow controllers under a state wherein pressure P1 is maintained more than approximately 2 times of pressure P2 on the downstream side of the orifice, and at the same time, one of the plurality of pressure type flow controllers is operated as a second controller controlling the gas flow rate range up to 10% of the maximum flow rate supplied to the chamber while the remaining pressure type flow controllers are operated as third controllers controlling the rest of the gas flow rate range, and pressure data is inputted to the first controller to adjust a control signal to each pressure type flow controller so as to control gas flow rate to the supply gas output part.
1 Assignment
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Accused Products
Abstract
A gas supply facility includes a plurality of pressure type flow controllers connected in parallel, and a first controller to control operation of the plurality of pressure type flow controllers so as to supply a desired gas exhausted by a vacuum pump to a chamber while controlling its flow rate, one of the pressure type flow controllers operates as a second controller to control the gas flow rate range up to 10% of the maximum flow rate supplied to the chamber, while the remaining pressure type flow controllers are made to be ones that control the rest of the gas flow rate range. Furthermore, pressure inside the chamber is controlled by installing a pressure detector in the chamber, inputting the value detected by the detector to the controller, and by adjusting a control signal to the pressure type flow controllers.
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Citations
10 Claims
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1. An internal pressure controller of a chamber, comprising:
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(a) a supply gas input part;
(b) a supply gas output part connected to receive supply gas from the supply gas input part;
(c) a gas flow rate control part operably connected between the gas input part and gas output part;
(d) a chamber connected to receive supply gas from the supply gas output part; and
(e) a means to transmit pressure data of the chamber to the gas flow rate control part, and the gas flow rate control part includes i. a plurality of pressure type flow rate controllers connected in parallel; and
ii. a first controller operable to control the operation of the plurality of pressure type flow controllers, wherein each pressure type flow controller comprises an orifice, a pressure detector on an upstream side of the orifice, a control valve provided on the upstream side of the pressure detector, and a computation control part that outputs a difference Qy with a set flow rate Qs as a driving signal to the control valve by computing a gas flow rate Qc passing through the orifice with pressure P1 detected by the pressure detector using formula Qc=KP1, where K is a constant, thus operating a respective one of the pressure type flow controllers under a state wherein pressure P1 is maintained more than approximately 2 times of pressure P2 on the downstream side of the orifice, and at the same time, one of the plurality of pressure type flow controllers is operated as a second controller controlling the gas flow rate range up to 10% of the maximum flow rate supplied to the chamber while the remaining pressure type flow controllers are operated as third controllers controlling the rest of the gas flow rate range, and pressure data is inputted to the first controller to adjust a control signal to each pressure type flow controller so as to control gas flow rate to the supply gas output part. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An internal pressure subject-to-control type chamber comprising:
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(a) a chamber exhausted by a vacuum pump; and
(b) a gas supply means for supplying a desired gas while controlling flow rate of the gas, wherein the gas supply means comprises i. a plurality of pressure type flow controllers connected in parallel; and
ii. a first controller operable to control the operation of the plurality of pressure type flow controllers, wherein the first controller comprises an orifice, a pressure detector on an upstream side of the orifice, a control valve provided on the upstream side of the pressure detector, and a computation control part that outputs a difference Qy with a set flow rate Qs as a driving signal to the control valve by computing a gas flow rate Qc passing through the orifice with pressure P1 detected by the pressure detector using formula Qc=KP1, where K is a constant, thus operating each pressure type flow controller under a state wherein pressure P1 is maintained more than 2 times of pressure P2 on the downstream side of the orifice, and at the same time, one of the plurality of pressure type flow controllers is operated as a second controller controlling the gas flow rate range up to 10% of the maximum flow rate supplied to the chamber while the remaining pressure type flow controllers control the rest of the flow rate ranges, and the chamber is further provided with a pressure detector, and a detected value of the pressure detector is inputted to the first controller to adjust a control signal transmitted to the pressure type flow controllers and to control the supply rate of gas to the chamber so internal pressure of the chamber is controlled with high accuracy over the wide range.
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Specification