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INTERNAL PRESSURE CONTROLLER OF CHAMBER AND INTERNAL PRESSURE SUBJECT -TO- CONTROL TYPE CHAMBER

  • US 20060207595A1
  • Filed: 04/06/2006
  • Published: 09/21/2006
  • Est. Priority Date: 10/06/2003
  • Status: Active Grant
First Claim
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1. An internal pressure controller of a chamber, comprising:

  • (a) a supply gas input part;

    (b) a supply gas output part connected to receive supply gas from the supply gas input part;

    (c) a gas flow rate control part operably connected between the gas input part and gas output part;

    (d) a chamber connected to receive supply gas from the supply gas output part; and

    (e) a means to transmit pressure data of the chamber to the gas flow rate control part, and the gas flow rate control part includes i. a plurality of pressure type flow rate controllers connected in parallel; and

    ii. a first controller operable to control the operation of the plurality of pressure type flow controllers, wherein each pressure type flow controller comprises an orifice, a pressure detector on an upstream side of the orifice, a control valve provided on the upstream side of the pressure detector, and a computation control part that outputs a difference Qy with a set flow rate Qs as a driving signal to the control valve by computing a gas flow rate Qc passing through the orifice with pressure P1 detected by the pressure detector using formula Qc=KP1, where K is a constant, thus operating a respective one of the pressure type flow controllers under a state wherein pressure P1 is maintained more than approximately 2 times of pressure P2 on the downstream side of the orifice, and at the same time, one of the plurality of pressure type flow controllers is operated as a second controller controlling the gas flow rate range up to 10% of the maximum flow rate supplied to the chamber while the remaining pressure type flow controllers are operated as third controllers controlling the rest of the gas flow rate range, and pressure data is inputted to the first controller to adjust a control signal to each pressure type flow controller so as to control gas flow rate to the supply gas output part.

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