Atmospheric transfer chamber, processed object transfer method, program for performing the transfer method, and storage medium storing the program
First Claim
1. An atmospheric transfer chamber, connected to an object processing chamber for processing a target object by using a plasma of a halogen-based gas, for transferring the target object therein, the atmospheric transfer chamber comprising:
- a dehumidifying unit for dehumidifying air in the atmospheric transfer chamber.
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Accused Products
Abstract
An atmospheric transfer chamber, connected to an object processing chamber for processing a target object by using a plasma of a halogen-based gas, for transferring the target object therein, the atmospheric transfer chamber includes a dehumidifying unit for dehumidifying air in the atmospheric transfer chamber. The dehumidifying unit includes a desiccant filter, a cooling unit for cooling the air introduced into the atmospheric transfer chamber, and an air conditioner. The atmospheric transfer chamber is connected to a reaction product removal chamber for removing reaction products of a halogen-based gas attached to the target object, wherein halogen in reaction products attached to the target object is reduced.
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Citations
23 Claims
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1. An atmospheric transfer chamber, connected to an object processing chamber for processing a target object by using a plasma of a halogen-based gas, for transferring the target object therein, the atmospheric transfer chamber comprising:
a dehumidifying unit for dehumidifying air in the atmospheric transfer chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. An atmospheric transfer chamber, connected to an object processing chamber for processing a target object by using a plasma of a halogen-based gas, for transferring the target object therein, the atmospheric transfer chamber comprising:
an interior heating unit for heating an inside of the atmospheric transfer chamber.
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17. A transfer method of a target object which is processed by using a plasma of a halogen-based gas, the method comprising the step of:
transferring the target object inside a dehumidified atmospheric transfer chamber.
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18. A program executable on a computer for performing a transfer method of a target object which is processed by using a plasma of a halogen-based gas, comprising:
a transfer module for transferring the target object inside a dehumidified atmospheric transfer chamber.
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19. A computer readable storage medium for storing therein a program executable on a computer for performing a transfer method of a target object which is processed by using a plasma of a halogen-based gas,
wherein the program includes a transfer module for transferring the target object inside a dehumidified atmospheric transfer chamber.
Specification