Plasma reactor
First Claim
1. A plasma reactor comprising a plasma generating electrode composed of a plurality of unit electrodes disposed facing vis-à
- -vis at a prescribed interval, each of the unit electrodes having a plate-like conductor and a ceramic dielectric provided on at least one of the surfaces of the plate-like conductor, a passage for gas containing specific components, and a casing for housing the plasma generating electrode and the gas passage, wherein two or more of the plasma generating electrodes are installed in series inside the gas passage in the casing, with each plasma generating electrode being electrically controlled independently, and a surface area of the conductor of the unit electrode forming the plasma generating electrode installed on an upstream side of the gas passage is smaller than a surface area of the conductor of the unit electrode forming the plasma generating electrode installed on a downstream side of the gas passage, whereby plasma can be generated between each of the unit electrodes by supplying each of the plasma generating electrodes with independently controlled electric power.
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Accused Products
Abstract
A plasma reactor is provided with two or more plasma generating electrodes which are installed in series inside a gas passage in a casing, with each plasma generating electrode being electrically controlled independently. The surface area of the conductor on each unit electrode forming the plasma generating electrode installed on the upstream side of the gas passage is smaller than the surface area of the conductor on the unit electrode forming the plasma generating electrode installed on the downstream side of the gas passage. Plasma can be generated between each of the unit electrodes by supplying each of the plasma generating electrodes with independently controlled electric power. The plasma reactor can efficiently react specific components contained in the gas passing through the gas passage.
21 Citations
12 Claims
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1. A plasma reactor comprising
a plasma generating electrode composed of a plurality of unit electrodes disposed facing vis-à - -vis at a prescribed interval, each of the unit electrodes having a plate-like conductor and a ceramic dielectric provided on at least one of the surfaces of the plate-like conductor,
a passage for gas containing specific components, and a casing for housing the plasma generating electrode and the gas passage, wherein two or more of the plasma generating electrodes are installed in series inside the gas passage in the casing, with each plasma generating electrode being electrically controlled independently, and a surface area of the conductor of the unit electrode forming the plasma generating electrode installed on an upstream side of the gas passage is smaller than a surface area of the conductor of the unit electrode forming the plasma generating electrode installed on a downstream side of the gas passage, whereby plasma can be generated between each of the unit electrodes by supplying each of the plasma generating electrodes with independently controlled electric power. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
- -vis at a prescribed interval, each of the unit electrodes having a plate-like conductor and a ceramic dielectric provided on at least one of the surfaces of the plate-like conductor,
Specification