Lithographic apparatus and device manufacturing method using repeated patterns in an LCD to reduce datapath volume

• US 20060209313A1
• Filed: 03/21/2005
• Published: 09/21/2006
• Est. Priority Date: 03/21/2005
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Morselt, Frank Anton, Martinus Van Hassel, Marco Cornelis Jacobus, Hendricus Hoeks, Martinus Hendricus, De Jager, Pieter Willem Herman, Van Den Akker, Theodorus Leonardus, Kessels, Lambertus Gerardus Maria
• Granted Patent: US 7,812,930 B2
• Time in Patent Office: Days
• US Class Current: 358/1.100
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
• CPC Class Codes: G03F 7/70508 Data handling in all parts of the microlithographic apparatus, e.g. handling pattern data for addressable masks or data transfer to or from different components within the exposure apparatus

Abstract

A method and device for programming an array of individually controllable elements configured to impart a beam with a pattern. For example, the method can be suitable for use in a lithographic apparatus. The method comprises generating first data representing a first pattern, generating second data representing a second pattern, writing the first data to a first buffer, and reading the first data from the first buffer to program the array of individually controllable elements to display the first pattern, while writing the second data to a second buffer in parallel.

Claims

1. A method, comprises:

storing data representing a pattern for programming an array of individually controllable elements that modulate a beam;

dividing the pattern into a plurality of regions;

assigning an identifier corresponding to a portion of the pattern to each of the plurality of regions; and

storing the portion of the pattern corresponding to each unique identifier.

2. The method of claim 1, wherein at least one of the identifiers and each corresponding ones of the portion of the pattern define a display pixel area.

3. The method of claim 1, wherein the identifiers comprise a matrix having an entry corresponding to each of the plurality of regions.

4. The method of claim 3, wherein at least one of the identifiers is repeated a plurality of times in the matrix.

5. The method of claim 4, wherein only one instance of the portion of the pattern for each identifier is stored, regardless of the number of times each identifier appears in the matrix.

6. The method of claim 1, wherein each of the plurality of regions comprises:

an integer number of display pixels, wherein the portion of the pattern corresponding to those display pixels comprises a fixed size bitmap.

7. The method of claim 1, wherein a total number of the plurality of regions is chosen in accordance with available memory storage space.

8. The method of claim 1, further comprising:

providing at least one buffer that stores at least one of the portions of the pattern;

transferring each portion of the pattern from the at least one buffer to a controller; and

actuating the array with the controller in accordance with the at least one of the portions of the pattern.

9. The method of claim 8, wherein the portion of the pattern held in the at least one buffer defines a display pixel area.

10. The method of claim 8, further comprising:

providing a plurality of the at least one buffer;

forming each of the plurality of the at least one buffers with a memory and a data processor, wherein the data processor decompresses data and is coupled connected to an output of the memory;

coupling the memory of at least one of the buffers to an input of a data processor of a different buffer; and

wherein the transferring step comprises transferring the at least one portion of the pattern from the at least one buffer to the different buffer prior to transferring the at least one portion of the pattern to the controller.

11. The method of claim 10, further comprising using a resource schedule to carry out the transfer of data between the at least one buffer and the different buffer.

12. The method of claim 11, wherein the resource schedule is generated based upon the extent of compression of the pattern data.

13. The method of claim 11, wherein the resource schedule is generated offline.

14. The method of claim 11, wherein the resource schedule is generated dynamically while the array is being programmed.

15. An apparatus, comprising:

a divider that divides a pattern used to adjust a patterning device into a plurality of regions;

an assigning device that assigns an identifier corresponding to a portion of the pattern to each of the plurality of regions; and

a storage device that stores the portion of the pattern corresponding to each unique identifier.

16. The apparatus of claim 15, wherein the storage device comprises:

at least one buffer that stores the portion of the pattern; and

a transferring device that transfers the portion of the pattern from the at least one buffer to a controller, wherein the controller actuates the patterning device in accordance with the portion of the pattern.

17. A lithographic apparatus, comprising:

an illumination system that supplies a beam of radiation;

an array of individually controllable elements that modulate the beam in accordance with at least one received pattern;

a projection system that projects the modulated beam onto a target portion of a substrate; and

a storage device that stores the pattern based on corresponding identifiers after the pattern has been divided into a plurality of regions each having a corresponding one of the identifiers.

18. A lithographic apparatus of claim 17, further comprising:

at least one buffer that stores at least one of the portions of the pattern.

19. A lithographic apparatus of claim 18, further comprising:

a controller that actuates the array of individually controllable elements in accordance with the portion of the pattern; and

a transferring device that transfers the portion of the pattern from the at least one buffer to the controller.