System and method of illuminating interferometric modulators using backlighting
First Claim
1. A method of manufacturing a spatial light modulator, comprising:
- forming at least one reflecting element on a substrate; and
forming a plurality of light-modulating elements on the substrate above the at least one reflecting element so as to form an light-modulating array, the light modulating array having at least one optically transmissive aperture region, each light modulating element comprising first and second optical surfaces that define an cavity, said second optical surface movable with respect to the first optical surface, wherein the at least one reflecting element is configured to receive light through the at least one aperture region and reflect at least a portion of the received light into said cavity.
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Accused Products
Abstract
An interferometric modulator array device with backlighting is disclosed. The interferometric modulator array device comprises a plurality of interferometric modulator elements, wherein each of the interferometric modulator elements comprises an optical cavity. The interferometric modulator array includes an optical aperture region, and at least one reflecting element is positioned so as to receive light passing through the optical aperture region and reflect at least a portion of the received light to the cavities of the interferometric modulator elements. In some embodiments, the interferometric modulator elements may be separated from each other such that an optical aperture region is formed between adjacent interferometric modulator elements.
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Citations
25 Claims
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1. A method of manufacturing a spatial light modulator, comprising:
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forming at least one reflecting element on a substrate; and
forming a plurality of light-modulating elements on the substrate above the at least one reflecting element so as to form an light-modulating array, the light modulating array having at least one optically transmissive aperture region, each light modulating element comprising first and second optical surfaces that define an cavity, said second optical surface movable with respect to the first optical surface, wherein the at least one reflecting element is configured to receive light through the at least one aperture region and reflect at least a portion of the received light into said cavity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of backlighting an interferometric modulator array, comprising:
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positioning a light source proximate a first side of the interferometric modulator array; and
reflecting light from the light source to a second opposite side of the interferometric modulator array with one or more reflecting elements positioned between a substrate and a plurality of interferometric modulator elements formed on the substrate. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25)
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Specification