Microelectromechanical system optical apparatus and method

• US 20060209385A1
• Filed: 03/15/2005
• Published: 09/21/2006
• Est. Priority Date: 03/15/2005
• Status: Active Grant

• Current Assignee: Google Technology Holdings LLC (Alphabet Inc.)
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Tungare, Aroon V., Zhang, Min-Xian M., Liu, Junhua
• Granted Patent: US 7,224,512 B2
• Time in Patent Office: Days
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A microelectromechanical systems (MEMS) apparatus (100) having a footprint of about 1 to 10 millimeters by about 1 to 10 millimeters comprises a movable member (101) that can be stopped at either of at least two positions by electrically neutral stops (105, 107). Depending upon the needs of a given application, these stops may all be fabricated using materials deposition and removal techniques or some, though not all, may comprise an attached component.

Claims

1. (canceled)

2. A microelectromechanical system (MEMS) apparatus comprising:

a movable member comprising two movable end portions that is movable between at least a first position and a second position;

an optical component disposed on the movable member, such that the optical component comprises a part of a first optical path when the movable member is in the first position and a part of a second optical path when the movable member is in the second position;

a plurality of electrically-neutral stops, comprising at least a first stop that prevents movement of the movable member beyond the first position and a second stop that prevents movement of the movable member beyond the second position;

wherein the at least a first stop further comprises at least a first pair of stops, wherein a first one of the first pair of stops is disposed to contact a first end of the movable member when the movable member is in the first position and a second one of the first pair of stops is disposed to contact a second end of the movable member when the movable member is in the first position.

3. The apparatus of claim 2 wherein the first end of the movable member comprises an end of the movable member that opposes the second end of the movable member.

4. The apparatus of claim 3 wherein the at least a second stop further comprises at least a second pair of stops, wherein a first one of the second pair of stops is disposed to contact the first end of the movable member when the movable member is in the second position and a second one of the second pair of stops is disposed to contact the second end of the movable member when the movable member is in the second position.

5. The apparatus of claim 2 wherein at least one of the plurality of electrically-neutral stops is comprised of electrically insulating material.

6. The apparatus of claim 2 wherein at least one of the plurality of electrically-neutral stops is comprised of electrically conductive material.

7. The apparatus of claim 2 wherein the movable member comprises a beam that pivots about at least a first pivot axis.

9. The apparatus of claim 2 wherein:

at least one of the plurality of electrically-neutral stops comprises an element that is formed via a material deposition process; and

at least one of the plurality of electrically-neutral stops comprises an attached element.

10. The apparatus of claim 2 wherein the movable member consists of at least one of:

electrically conductive metal; and

polyimide having a metalized exterior surface.

8. A microelectromechanical system (MEMS) apparatus comprising:

a movable member comprising two movable end portions that is movable between at least a first position and a second position;

an optical component disposed on the movable member, such that the optical component comprises a part of a first optical path when the movable member is in the first position and a part of a second optical path when the movable member is in the second position;

a plurality of electrically-neutral stops, comprising at least a first stop that prevents movement of the movable member beyond the first position and a second stop that prevents movement of the movable member beyond the second position;

wherein the movable member comprises a beam that pivots about at least a first pivot axis and a second pivot axis, which second pivot axis is different from the first pivot axis.

11. (canceled)

12. (canceled)

13. A microelectromechanical system (MEMS) apparatus comprising:

a plurality of electrical circuit elements;

an optical element responsive, at least in part, to selective energization of at least one of the plurality of electrical circuit elements;

wherein at least one of the plurality of electrical circuit elements comprises an element that is formed via a material deposition process and at least one of the plurality of electrical circuit elements comprises an attached element;

wherein the attached element comprises a part of a capacitor and a shell comprised of electrically insulating material and electrically conductive material.

14. The apparatus of claim 13 further comprising:

a movable member having the optical element disposed thereon, wherein the movable member is movable between at least a first position and a second position;

and wherein the shell further serves as a stop for the movable member that corresponds to the first position.

15. The apparatus of claim 14 wherein the shell further serves as a stop for the movable member that corresponds to the second position.

16. The apparatus of claim 15 wherein the movable member substantially consists of electrically conductive metal.

17. The apparatus of claim 15 wherein the movable member substantially consists of an insulating member that supports an electrically conductive metal.

18. The apparatus of claim 13 wherein the shell has at least one optical aperture disposed therethrough.

19. (canceled)

20. A microelectromechanical system (MEMS) apparatus comprising:

a pivoting movable member that is movable between at least a first position and a second position, wherein the movable member is comprised, in substantial part, of at least one of;

electrically conductive metal;

polyimide in combination with an electrically conductive metal;

an optical component disposed on the movable member, such that the optical component comprises a part of a first optical path when the movable member is in the first position and a part of a second optical path when the movable member is in the second position;

a discrete shell disposed over at least the movable member, wherein the discrete shell comprises, at least in part, electrically conductive elements to facilitate selective movement of the movable member.