Inspection method and inspection apparatus
First Claim
1. An inspection method for extracting the feature amount of the input measurement data and discriminating the conformity/nonconformity of an object to be inspected, based on the extracted feature amount, comprising the steps of:
- discriminating the conformity/nonconformity of a product in accordance with a model based on the normality data obtained from a conforming product;
discriminating the conformity/nonconformity of a product based on the result of discrimination of the measurement data of the object to be inspected, according to both a parametric discrimination model and a nonparametric discrimination model in an adjust stage where a sufficient amount of sample data cannot be acquired or the conforming product distribution in the feature space is unstable and therefore the estimation accuracy of the shape of the normal area is not sufficient; and
discriminating the conformity/nonconformity of the product based only on the result of discrimination of the measurement data of the object to be inspected, according to the parametric discrimination model in a stable stage where a sufficient amount of sample data can be acquired and the conforming product distribution and the shape of the normal area is stable.
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Accused Products
Abstract
An inspection method and an inspection apparatus are disclosed, wherein the appropriate inspection can be conducted in accordance with the situation change of a nonconforming product from an initial stage, an adjust stage and a stable stage. The conformity/nonconformity is discriminated according to a MTS model and a one class SVM model based on the normal data obtained from a conforming product. The conformity/nonconformity is discriminated by both the MTS and the one class SVM in an adjust stage where a sufficient amount of sample data cannot be acquired or the shape of the conforming product distribution in the feature space and the shape of the normal area are unstable, and only by the MTS in a stable stage where a sufficient amount of sample data can be acquired and the shape of the conforming product distribution and the shape of the normal area are stable.
34 Citations
15 Claims
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1. An inspection method for extracting the feature amount of the input measurement data and discriminating the conformity/nonconformity of an object to be inspected, based on the extracted feature amount, comprising the steps of:
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discriminating the conformity/nonconformity of a product in accordance with a model based on the normality data obtained from a conforming product;
discriminating the conformity/nonconformity of a product based on the result of discrimination of the measurement data of the object to be inspected, according to both a parametric discrimination model and a nonparametric discrimination model in an adjust stage where a sufficient amount of sample data cannot be acquired or the conforming product distribution in the feature space is unstable and therefore the estimation accuracy of the shape of the normal area is not sufficient; and
discriminating the conformity/nonconformity of the product based only on the result of discrimination of the measurement data of the object to be inspected, according to the parametric discrimination model in a stable stage where a sufficient amount of sample data can be acquired and the conforming product distribution and the shape of the normal area is stable. - View Dependent Claims (2, 3, 4)
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5. An inspection method for extracting the feature amount of the input measurement data and discriminating the conformity/nonconformity of an object to be inspected, based on the extracted feature amount, comprising the steps of:
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discriminating the conformity/nonconformity of the product in accordance with a model based on the normality data obtained from a conforming product;
discriminating the conformity/nonconformity of the product based only on the result of discrimination of the measurement data of the object to be inspected, according to the nonparametric discrimination model in an initial stage where only a few sample data can be acquired and the conforming production distribution in the feature space and the shape of the normal cannot be estimated;
discriminating the conformity/nonconformity of the product based on the measurement data of the object to be inspected, according to both the parametric and nonparametric discrimination models, and determining the conformity/nonconformity of the product using the result of both the parametric and nonparametric discrimination models in an adjust stage where a sufficient amount of sample data cannot be acquired or the shape of the conforming product distribution in the feature space is unstable and the accuracy of estimation of the shape of the normal area is insufficient; and
discriminating the conformity/nonconformity of the product based on the measurement data of the object to be inspected, according to only the result of the parametric discrimination model in a stable stage where a sufficient amount of sample data can be acquired and the conforming product distribution and the shape of the normal area are stable. - View Dependent Claims (6, 7, 8, 9)
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10. An inspection apparatus for extracting the feature amount of the input measurement data and discriminating the conformity/nonconformity of an object to be inspected, based on the extracted feature amount:
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wherein the conformity/nonconformity discrimination is carried out in accordance with a model generated based on the normal measurement data obtained from a conforming product;
the apparatus further comprising the function of discriminating the conformity/nonconformity according to the parametric discrimination model and the function of discriminating the conformity/nonconformity according to the nonparametric discrimination model;
wherein the function of discriminating the conformity/nonconformity according to the parametric discrimination model and the function of discriminating the conformity/nonconformity according to the nonparametric discrimination model include a control device for controlling and permitting one of the functions to be executed alone or both of the functions to be executed at the same time;
the control device performing the control operation in such a manner that;
both the function of discriminating the conformity/nonconformity according to the parametric discrimination model and the function of discriminating the conformity/nonconformity according to the nonparametric discrimination model based on the measurement data of the object to be inspected are executed and the conformity/nonconformity is finally discriminated based on the discrimination results of the two functions in an adjust stage where a sufficient amount of sample data cannot be acquired or the shape of the conforming product distribution in the feature space is unstable so that the estimation accuracy of the shape of the normal area is not sufficient; and
the conformity/nonconformity is discriminated based only on the function of discriminating the conformity/nonconformity based on the measurement data of the object to be inspected, according to the parametric discrimination model in a stable stage where a sufficient amount of sample data can be acquired and the shape of the conforming product distribution and the shape of the normal area are stable. - View Dependent Claims (11, 12, 13, 14, 15)
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Specification