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Pattern inspection method and apparatus

  • US 20060210142A1
  • Filed: 01/19/2006
  • Published: 09/21/2006
  • Est. Priority Date: 01/26/2005
  • Status: Active Grant
First Claim
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1. A pattern inspection method comprising the steps of:

  • magnifying and taking a color image including an inspection object over a substrate;

    generating data of the taken color image;

    taking color information from the data of the color image; and

    judging the inspection object over the substrate using the color information.

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