QUADRATURE REDUCTION IN MEMS GYRO DEVICES USING QUAD STEERING VOLTAGES
First Claim
1. A MEMS-type gyroscope, comprising:
- one or more proof masses configured to oscillate in a drive plane above a support substrate;
a sense electrode positioned adjacent to each of the one or more proof masses;
a sense bias voltage source for inducing a charge between the one or more proof masses and corresponding sense electrode; and
one or more quad steering voltage members positioned adjacent to each of the one or more proof masses, each of said one or more quad steering voltage members being electrically coupled to a quad steering voltage for electrostatically reducing quadrature motion of the one or more proof masses.
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Abstract
Devices and methods for reducing quadrature motion in a MEMS-type gyroscope are disclosed. A MEMS-type gyroscope in accordance with an illustrative embodiment of the present invention can include one or more proof masses configured to oscillate in a drive plane above a sense electrode for measuring Coriolis forces exerted on the one or more proof masses resulting from motion of the gyroscope about an input axis. One or more quad steering voltage members can be positioned adjacent each of the one or more proof masses and activated to electrostatically attract the proof masses toward the sense electrodes to reduce quadrature motion of the proof masses. A levitation force can be induced in certain embodiments to further reduce quadrature motion of the proof masses, if desired.
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Citations
41 Claims
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1. A MEMS-type gyroscope, comprising:
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one or more proof masses configured to oscillate in a drive plane above a support substrate;
a sense electrode positioned adjacent to each of the one or more proof masses;
a sense bias voltage source for inducing a charge between the one or more proof masses and corresponding sense electrode; and
one or more quad steering voltage members positioned adjacent to each of the one or more proof masses, each of said one or more quad steering voltage members being electrically coupled to a quad steering voltage for electrostatically reducing quadrature motion of the one or more proof masses. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A MEMS-type gyroscope, comprising:
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one or more proof masses configured to oscillate in a drive plane above a support substrate, each of said one or more proof masses being electrically grounded to the support substrate by one or more suspension springs;
a sense electrode positioned adjacent to and parallel with each of the one or more proof masses;
a sense bias voltage for inducing a charge between the one or more proof masses and corresponding sense electrode;
one or more quad steering voltage members positioned adjacent to and parallel with each proof mass, each of said one or more quad steering voltage members being electrically coupled to a quad steering voltage, the quad steering voltage adapted to electrostatically reduce quadrature motion of the one or more proof masses; and
sensing means for measuring the Coriolis force exerted on the one or more proof masses and outputting a rate signal corresponding to the rate of rotation of the gyroscope about an input axis. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. A method for reducing quadrature motion in a gyroscope using quad steering voltages, comprising the steps of:
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providing a gyroscope having a proof mass configured to oscillate back and forth in a drive plane above a sense electrode;
providing one or more quad steering voltage members adjacent the proof mass; and
applying a quad steering voltage to the one or more quad steering voltage members to electrostatically attract the proof mass towards the sense electrode in a manner that reduces the quadrature motion of the proof mass. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38)
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39. A method for reducing quadrature motion in a gyroscope using quad steering voltages, comprising the steps of:
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providing a gyroscope having a proof mass configured to oscillate back and forth in a drive plane above a sense electrode;
providing a quad steering voltage member laterally adjacent a first end of the sense electrode; and
applying a quad steering voltage to the quad steering voltage member to electrostatically attract the proof mass towards the sense electrode when quadrature of the proof mass occurs. - View Dependent Claims (40, 41)
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Specification