Pressure sensor device and pressure sensor cell thereof
First Claim
Patent Images
1. A pressure sensor device comprising:
- a pressure sensor cell comprising;
a pressure sensor chip having a pressure receiving section for receiving pressure and means for converting strain of the pressure receiving section into an electrical signal;
a base member having a first face, a second face, and a through hole extending through the first and second faces;
pressure introducing means having a first face, a second face, and a through hole penetrating through the first and second faces;
a resin case having a signal terminal for outputting the electrical signal from the pressure sensor chip;
a joining member joining the pressure introducing means and the base member; and
at least one of a protective member or a filler, wherein the pressure sensor chip is joined to the second face of the base member with the pressure receiving section facing the through hole of the base member, wherein the joining member joins the second face of the pressure introducing means to the first face of the base member with the through hole of the pressure introducing means communicating with the through hole of the base member, wherein one of the protective member or filler covers the joining member, wherein the resin case is bonded to the pressure introducing means, and wherein the pressure sensor chip and the signal terminal are electrically connected together by wire bonding.
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Accused Products
Abstract
A pressure sensor device includes a pressure sensor cell that includes a sensor chip having a diaphragm with piezo-resistors, an amplifying circuit, and various adjusting circuits, and a base member to which the sensor chip is joined, with the diaphragm facing a through hole of the base member. The base member and a metallic member are joined together with a joining member so that their respective through holes communicate with each other. A protective film or filler covers the joining member between the base member and the metallic pipe member. The metallic pipe member is bonded to a resin case, and a signal terminal of the resin case and the pressure sensor chip are electrically connected together by wire bonding, thus forming a pressure sensor cell. The metallic pipe member protrudes beyond an end face of the resin case to support load.
45 Citations
29 Claims
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1. A pressure sensor device comprising:
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a pressure sensor cell comprising;
a pressure sensor chip having a pressure receiving section for receiving pressure and means for converting strain of the pressure receiving section into an electrical signal;
a base member having a first face, a second face, and a through hole extending through the first and second faces;
pressure introducing means having a first face, a second face, and a through hole penetrating through the first and second faces;
a resin case having a signal terminal for outputting the electrical signal from the pressure sensor chip;
a joining member joining the pressure introducing means and the base member; and
at least one of a protective member or a filler, wherein the pressure sensor chip is joined to the second face of the base member with the pressure receiving section facing the through hole of the base member, wherein the joining member joins the second face of the pressure introducing means to the first face of the base member with the through hole of the pressure introducing means communicating with the through hole of the base member, wherein one of the protective member or filler covers the joining member, wherein the resin case is bonded to the pressure introducing means, and wherein the pressure sensor chip and the signal terminal are electrically connected together by wire bonding. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A pressure sensor device comprising:
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a pressure sensor cell comprising;
a pressure sensor chip having a pressure receiving section for receiving pressure and means for converting strain of the pressure receiving section into an electrical signal;
a base member having a first face, a second face, and a through hole extending through the first and second faces;
pressure introducing means having a first face, a second face, and a through hole penetrating through the first and second faces;
a resin case having a signal terminal for outputting the electrical signal from the pressure sensor chip; and
a joining member joining the pressure introducing means and the base member, wherein the pressure sensor chip is joined to the second face of the base member with the pressure receiving section facing the through hole of the base member, wherein the joining member joins the second face of the pressure introducing means to the first face of the base member with the through hole of the pressure introducing means communicating with the through hole of the base member, wherein the resin case is bonded to the pressure introducing means, wherein the pressure introducing means protrudes beyond an end face of the resin case, and wherein the pressure sensor chip and the signal terminal are electrically connected together by wire bonding. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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Specification
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Granted Patent
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Time in Patent OfficeDays
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Field of Search
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US Class Current73/754
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CPC Class CodesG01L 19/0084 to the outside of the housi...G01L 19/0627 Protection against aggressi...G01L 19/147 Details about the mounting ...H01L 2224/48091 ArchedH01L 2224/48247 connecting the wire to a bo...H01L 2224/49171 Fan-out arrangementsH01L 2924/00 Indexing scheme for arrange...H01L 2924/00014 the subject-matter covered ...H01L 2924/01322 Eutectic Alloys, i.e. obtai...H01L 2924/10253 Silicon [Si]
