Method of Arc Detection
First Claim
1. A method for detecting arcs in a plasma process that is fed by an AC generator with an output signal of the AC generator for supplying power, the method comprising:
- determining a reference value based on a time response and a duration of half waves of the output signal or of an internal signal of the AC generator, comparing the reference value with a threshold value, and detecting an arc if a predetermined result of the comparison is obtained.
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Accused Products
Abstract
New methods are used for detecting arcs in a plasma process that is fed by, for example, a freely oscillating AC generator with an output signal of the AC generator for supplying power. The method includes measuring or determining a reference value that is based on a time response of the output signal or of an internal signal of the AC generator relating to the output signal. The methods also include comparing the reference value with a threshold value and detecting an arc when a predetermined result of the comparison is obtained.
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Citations
20 Claims
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1. A method for detecting arcs in a plasma process that is fed by an AC generator with an output signal of the AC generator for supplying power, the method comprising:
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determining a reference value based on a time response and a duration of half waves of the output signal or of an internal signal of the AC generator, comparing the reference value with a threshold value, and detecting an arc if a predetermined result of the comparison is obtained. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A plasma excitation arrangement comprising:
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an AC generator that can be connected to a plasma process, a signal monitoring means coupled to the AC generator for monitoring a time response of an output signal of the AC generator or an internal signal of the AC generator, a reference value determining means connected to the signal monitoring means and to a comparator to produce a reference value based on the time response including detecting duration of half waves of the output signal or the internal signal, a threshold value presetting means connected to the comparator, and a means for generating a shut-down signal that is connected to the comparator. - View Dependent Claims (16, 17, 18)
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19. A plasma excitation arrangement comprising:
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an AC generator that produces an output signal that can be connected to a plasma process and includes an internal signal, a signal monitoring device coupled to the AC generator to monitor a time response of the output signal of the AC generator or of the internal signal of the AC generator including a duration of half waves of the output signal of the AC generator or of the internal signal of the AC generator, a reference value device connected to the signal monitoring device to produce a reference value based on the time response, a threshold value device that produces a threshold value at an output, a comparator connected to the reference value device to receive the reference value and connected to the threshold value device to receive the threshold value, wherein the comparator compares the reference value and the threshold value and produces a shut-down signal depending on the result of the comparison, and a controller coupled to the comparator and connected to the AC generator, wherein the controller sends the shut-down signal to the AC generator. - View Dependent Claims (20)
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Specification